Chemical-sensing devices

• US 20050241959A1
• Filed: 04/30/2004
• Published: 11/03/2005
• Est. Priority Date: 04/30/2004
• Status: Abandoned Application

• Current Assignee: Hewlett-Packard Development Company, L.P. (HP Inc.)
• Original Assignee: Hewlett-Packard Development Company, L.P. (HP Inc.)
• Inventors: Wei, Qingqiao, Peters, Kevin F., Kornilovich, Pavel, Ward, Kenneth
• Application Number:
  US10/837,554
• Publication Number:
  US 20050241959A1
• Time in Patent Office: Days
• US Class Current: 205/792
• CPC Class Codes: G01N 27/4146 involving nanosized elements, e.g. nanotubes, nanowires

Abstract

The disclosure relates to a system having a chemical sensor and either a temperature sensor or an ionic-strength sensor in a same fluidic channel. The disclosure also related to a system having a chemical sensor and either a temperature sensor or an ionic-strength sensor over a same substrate. This system can be capable of measuring chemical concentrations of two or more chemicals and a temperature or ionic strength of a fluid.

Claims

1. A system comprising:

a micro-scale fluidic channel;

an electrochemical sensor oriented in the fluidic channel; and

one or more of a temperature sensor or an ionic-strength sensor oriented in the fluidic channel.

2. The system of claim 1, wherein the one or more sensors comprise at least one temperature sensor and at least one ionic-strength sensor.

3. The system of claim 2, wherein the temperature sensor and the ionic-strength sensor are within about 100 nanometers of the electrochemical sensor.

4. The system of claim 2, wherein the temperature sensor and the ionic-strength sensor are within about tens of microns of the electrochemical sensor.

5. The system of claim 1, wherein the one or more sensors comprise at least two of the same type of sensors.

6. The system of claim 5, wherein a first of the two same type of sensor is oriented upstream of the electrochemical sensor, and a second of the same type of sensor is oriented downstream of the electrochemical sensor.

7. The system of claim 1, further comprising a reference electrode.

8. The system of claim 1, further comprising a first reference electrode and a second reference electrode, wherein the first reference electrode is oriented upstream of the electrochemical sensor and the second reference electrode is oriented downstream of the electrochemical sensor.

9. The system of claim 1, wherein the fluidic channel is about 100 nanometers to about 10 millimeters in length.

10. The system of claim 1, oriented over a single substrate.

11. The system of claim 10, wherein the substrate comprises a single-crystal semiconductive wafer or chip.

12. The system of claim 1, wherein at least one of a same one or more sensors is disposed within about 100 nanometers of the electrochemical sensor.

13. The system of claim 1, wherein the one or more sensors comprises at least an ionic-strength sensor having two conductive bodies separated by a space in the fluidic channel.

14. The system of claim 1, wherein the one or more sensors comprises at least an ionic-strength sensor having four conductive bodies separated by spaces in the fluidic channel.

15. The system of claim 1, wherein the one or more sensors comprises at least a temperature sensor having a structure with a substantial temperature coefficient of resistance.

16. The system of claim 15, wherein the structure comprises a serpentine structure.

17. The system of claim 1, wherein the one or more sensors comprises at least a temperature sensor capable of heating a fluid in the fluidic channel.

18. The system of claim 1, wherein the electrochemical sensor comprises a chemical-sensitive field effect transistor.

19. The system of claim 18, wherein the electrochemical sensor comprises source and drain regions and an electrical channel region comprising an insulative layer and a molecular probe layer.

20. The system of claim 18, wherein the electrochemical sensor comprises electrical channel, source, and drain regions, the electrical channel region having an elongated portion and a cross-section perpendicular to the elongated portion having a maximum dimension of less than about 100 nanometers.

21. The system of claim 18, wherein the electrochemical sensor comprises an electrical channel and a probe layer, the probe layer overlaying the electrical channel such that an electrochemically chargeable surface of the probe layer is within about ten nanometers of a surface of the electrical channel.

22. The system of claim 18, wherein the electrochemical sensor comprises an electrical channel and a probe layer, the probe layer surrounding a majority of a surface area of the electrical channel.

23. The system of claim 1, further comprising a second electrochemical sensor.

24. The system of claim 23, wherein the first electrochemical sensor and the second electrochemical sensor are chemically sensitive to different chemicals.

25. The system of claim 1, further comprising two or more additional electrochemical sensors.

26. The system of claim 1, further comprising two or more additional electrochemical sensors, each of the additional electrochemical sensors being chemically sensitive to different chemicals.

27. The system of claim 1, further comprising an electric or computer analysis system capable of reading, analyzing, recording, or communicating a measurement of the electrochemical sensor.

28. A system comprising:

a single substrate;

a chemical sensor supported by the substrate; and

one or more of a temperature sensor and an ionic-strength sensor supported by the substrate in proximity to the chemical sensor.

29. The system of claim 28, further comprising a fluidic channel supported by the substrate and enabling fluid flow over the chemical sensor and the one or more sensors.

30. The system of claim 28, wherein the one or more sensors comprise at least one temperature sensor and at least one ionic-strength sensor.

31. The system of claim 30, wherein the temperature sensor and the ionic-strength sensor are within about 100 nanometers of the chemical sensor.

32. The system of claim 30, wherein the temperature sensor and the ionic-strength sensor are within about tens of microns of the chemical sensor.

33. The system of claim 28, wherein the one or more sensors comprise at least two of the same type of sensors.

34. The system of claim 28, further comprising a reference electrode.

35. The system of claim 34, wherein the reference electrode is oriented on the substrate.

36. The system of claim 28, wherein the substrate comprises a single-crystal semiconductive wafer or chip.

37. The system of claim 28, wherein at least one of a same one or more sensors is disposed within about 100 nanometers of the chemical sensor.

38. The system of claim 28, wherein at least one of a same one or more sensors is disposed within about tens of microns of the chemical sensor.

39. The system of claim 28, wherein the one or more sensors comprises at least an ionic-strength sensor having two conductive bodies separated by a space that can be filled by a fluid.

40. The system of claim 28, wherein the one or more sensors comprises at least a temperature sensor having a structure with a substantial temperature coefficient of resistance that is in the fluidic channel.

41. The system of claim 40, wherein the structure comprises a serpentine structure.

42. The system of claim 28, wherein the one or more of the temperature sensor and the ionic-strength sensor comprises at least a temperature sensor capable of providing heat.

43. The system of claim 28, wherein the chemical sensor comprises a chemical-sensitive field effect transistor.

44. The system of claim 28, wherein the chemical sensor comprises an electrical channel region comprising an insulative layer and a molecular probe layer.

45. The system of claim 28, wherein the chemical sensor comprises gate, source, and drain regions, the electrical channel region having an elongated dimension electrically connecting the source and drain regions.

46. The system of claim 28, wherein the chemical sensor comprises an electrical channel region having an elongated portion and a cross-section perpendicular to the elongated portion having a maximum dimension of less than about 100 nanometers.

47. The system of claim 28, wherein the chemical sensor comprises an electrical channel and a probe layer, the probe layer overlaying the electrical channel such that a chargeable surface of the probe layer is within about ten to about 100 nanometers of a surface of the electrical channel.

48. The system of claim 28, wherein the chemical sensor comprises an electrical channel region having a probe layer, the probe layer surrounding a majority of a surface area of the electrical channel region.

49. The system of claim 28, further comprising a second chemical sensor supported by the substrate.

50. The system of claim 49, wherein the first chemical sensor and the second chemical sensor are chemically sensitive to different chemicals.

51. The system of claim 28, further comprising two or more additional chemical sensors.

52. A chemical-sensitive device comprising:

means for electrically measuring a concentration of a chemical in a fluid; and

means for measuring a temperature of the fluid; and

means for calibrating the measurement of the concentration.

53. The device of claim 52, wherein the means for electrically measuring the concentration and the means for measuring the temperature are disposed within about 100 nanometers.

54. The device of claim 52, wherein the means for measuring the temperature of the fluid is disposed to measure the fluid at a first location, and further comprising a second means for measuring a second temperature of the fluid at a second location.

55. The device of claim 52, further comprising a means for measuring an ionic strength of the fluid.

56. The device of claim 52, further comprising a means for heating the fluid.

57. The device of claim 52, wherein the means for measuring the temperature comprises a means for heating the fluid.

58. The device of claim 52, further comprising a means for electrically measuring a concentration of a second chemical in the fluid.

59. The device of claim 52, further comprising a means for directing the fluid over the means for measuring the concentration and the means for measuring the temperature.

60. The device of claim 52, further comprising:

a means for measuring an ionic strength of the fluid; and

a means for directing the fluid over the means for measuring the concentration and the means for measuring the ionic strength.

61. A chemical-sensitive device comprising:

means for measuring a chemical concentration of a chemical in a fluid; and

means for measuring an ionic strength of the fluid; and

means for calibrating the measurement of the chemical concentration.

62. The device of claim 61, wherein the means for measuring the chemical concentration and the means for measuring the ionic strength are disposed within about 100 nanometers.

63. The device of claim 61, wherein the means for measuring the ionic strength of the fluid is disposed to measure the fluid at a first location, and further comprising a second means for measuring a second ionic strength of the fluid at a second location.

64. The device of claim 61, further comprising a means for measuring a temperature of the fluid.

65. The device of claim 64, wherein the means for measuring the temperature comprises a means for heating the fluid.

66. The device of claim 61, further comprising a means for heating the fluid.

67. The device of claim 61, further comprising a means for measuring a second chemical concentration of a second chemical in the fluid.

68. The device of claim 61, further comprising a means for directing the fluid over the means for measuring the concentration and the means for measuring the ionic strength.

69. The device of claim 61, further comprising:

a means for measuring a temperature of the fluid; and

a means for directing the fluid over the means for measuring the concentration and the means for measuring the temperature.

70. A method comprising:

providing a micro-scale fluidic channel;

positioning an electrochemical sensor within the fluidic channel capable of measuring a concentration of a chemical in a fluid; and

positioning at least one of a temperature sensor and an ionic-strength sensor within the fluidic channel for measuring a temperature or an ionic strength of the fluid.

71. The method of claim 70, wherein the act of positioning the electrochemical sensor comprises positioning the electrochemical sensor within 100 nanometers of the at least one sensor.

72. The method of claim 70, wherein the act of positioning the at least one of the temperature sensor and the ionic-strength sensor comprises positioning the temperature sensor or the ionic-strength sensor within 100 nanometers of the electrochemical sensor.

73. The method of claim 70, wherein the act of positioning the at least one of the temperature sensor and the ionic-strength sensor comprises positioning it upstream of the electrochemical sensor.

74. The method of claim 70, wherein the act of positioning the at least one of the temperature sensor and the ionic-strength sensor comprises positioning it downstream of the electrochemical sensor.

75. The method of claim 70, wherein the act of positioning the at least one of the temperature sensor and the ionic-strength sensor comprises positioning a temperature sensor and an ionic-strength sensor upstream of the electrochemical sensor.

76. The method of claim 70, wherein the act of positioning the at least one of the temperature sensor and the ionic-strength sensor comprises positioning a temperature sensor and an ionic-strength sensor downstream of the electrochemical sensor.

77. The method of claim 70, wherein the act of positioning the at least one of the temperature sensor and the ionic-strength sensor comprises positioning a first temperature sensor and a first ionic-strength sensor upstream of the electrochemical sensor and a second temperature sensor and a second ionic-strength sensor downstream of the electrochemical sensor.

78. The method of claim 70, wherein the act of positioning the at least one of the temperature sensor and the ionic-strength sensor comprises positioning a first temperature sensor upstream of the electrochemical sensor and a second temperature sensor downstream of the electrochemical sensor.

79. The method of claim 70, wherein the act of positioning the at least one of the temperature sensor and the ionic-strength sensor comprises positioning one or more temperature sensors in the fluidic channel.

80. The method of claim 70, wherein the act of positioning the at least one of the temperature sensor and the ionic-strength sensor comprises positioning one or more ionic-strength sensors in the fluidic channel.

81. The method of claim 70, wherein the act of positioning the at least one of the temperature sensor and the ionic-strength sensor comprises positioning one or more ionic-strength sensors and one or more temperature sensors in the fluidic channel.

82. The method of claim 70, further comprising providing a computer system capable of calibrating a chemical concentration of a fluid measured by the electrochemical sensor using a measured temperature or ionic strength of the fluid, the measured temperature or ionic strength being measured by one of the temperature sensor or the ionic-strength sensor.

83. A method of identifying a property of a bodily fluid, comprising:

(a) providing a fluidic channel including at least one ChemFET and a temperature sensor;

(b) passing the bodily fluid through the fluidic channel;

(c) while performing act (b) determining the response of the ChemFET;

(d) while performing act (b) using the temperature sensor to sense the temperature of the bodily fluid in the vicinity of the ChemFET; and

(e) identifying a property of the bodily fluid using the determined response of the ChemFET and the sensed temperature.

84. The method of claim 83, wherein the property is a concentration of an analyte and the bodily fluid is blood.

85. The method of claim 84, wherein the analyte comprises a disease indicator in the blood.

86. The method of claim 84, wherein the fluidic channel further comprises an ionic-strength sensor and the method further comprises:

(f) while performing act (b), measuring the ionic strength of the bodily fluid using the ionic-strength sensor; and

wherein act (e) is performed by also using the measured ionic strength.

87. The method of claim 86, wherein the temperature sensor and the ionic-strength sensor are each located within 100 nanometers of the ChemFET sensor.