Three-dimensional magnetic direction sensor, and magneto-impedance sensor element
First Claim
1. A three-dimensional magnetic bearing sensor including a first sensor, a second sensor, and a third sensor each constituted by a magneto-impedance sensor element comprising a magnetic sensitive member having a characteristic changed responsive to an external magnetic field, an insulator formed to allow penetration of said magnetic sensitive member therethrough, and an electromagnetic coil made up of foil-like conductive patterns arranged in adjacent relation on an outer surface of said insulator, wherein said first sensor, said second sensor, and said third sensor are disposed such that directions in which said magnetic sensitive members in respective sensors have maximum magnetic field detection sensitivities are substantially orthogonal to each other:
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Accused Products
Abstract
A three-dimensional magnetic bearing sensor 10a includes a first sensor 101, a second sensor 102, and a third sensor 103 each constituted by a magneto-impedance sensor element 10 comprising a magnetic sensitive member 2 having a characteristic changed responsive to an external magnetic field, an insulator 4 formed to allow penetration of the magnetic sensitive member 2 therethrough, and an electromagnetic coil 3 made up of foil-like conductive patterns 31, 32 arranged in adjacent relation on an outer surface of the insulator 4. The first sensor 101, the second sensor 102, and the third sensor 103 are disposed such that directions in which the magnetic sensitive members 2 in respective sensors have maximum magnetic field detection sensitivities are substantially orthogonal to each other.
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Citations
18 Claims
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1. A three-dimensional magnetic bearing sensor including a first sensor, a second sensor, and a third sensor each constituted by a magneto-impedance sensor element comprising a magnetic sensitive member having a characteristic changed responsive to an external magnetic field, an insulator formed to allow penetration of said magnetic sensitive member therethrough, and an electromagnetic coil made up of foil-like conductive patterns arranged in adjacent relation on an outer surface of said insulator,
wherein said first sensor, said second sensor, and said third sensor are disposed such that directions in which said magnetic sensitive members in respective sensors have maximum magnetic field detection sensitivities are substantially orthogonal to each other:
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16. A magneto-impedance sensor element made by winding an electromagnetic coil around a magnetic sensitive member having a characteristic changed responsive to an external magnetic field,
wherein said magneto-impedance sensor element comprises a sensor substrate for holding said magnetic sensitive member, an insulator formed to allow penetration of said magnetic sensitive member therethrough, and an electromagnetic coil made up of foil-like conductive patterns arranged in adjacent relation on an outer surface of said insulator, and wherein said sensor substrate has electrodes extended from said electromagnetic coil and said magnetic sensitive member, said electrodes being formed on one of outer surfaces of said sensor substrate which is substantially orthogonal to the axial direction of said magnetic sensitive member.
Specification