Lithographic apparatus and device manufacturing
First Claim
1. A lithographic apparatus, comprising:
- an illumination system that supplies a projection beam of radiation;
a patterning system that patterns the projection beam;
a substrate table that supports a substrate; and
a projection system that projects the patterned beam onto a target portion of the substrate and defines a pupil between the patterning system and the substrate table, the projection system comprising, a series of lens components located between the pupil and the substrate table, the lens components comprising, a beam expander that expands the patterned beam from the pupil, and an array of lenses extending transversely relative to the patterned beam, such that each lens of the array of lenses focuses a respective portion of the patterned beam onto a respective part of the target portion of the substrate, wherein a position of at least one of the lens components is adjustable relative to the pupil to adjust a magnification of the projection system.
1 Assignment
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Accused Products
Abstract
A lithographic apparatus and method project a patterned beam of radiation onto a substrate supported by a substrate table. The pattern is imparted to the beam using a patterning system. The patterned beam is projected onto a target portion of the substrate by a projection system. The projection system defines a pupil between the patterning system and the substrate table. A series of lens components are located between the pupil and the substrate table. The lens components comprise a beam expander, for expanding the beam from the pupil, and an array of lenses extending transversely relative to the beam such that each lens of the array focuses a respective portion of the projection beam onto a respective part of the target portion of the substrate. The position of at least one of the lens components is adjusted to adjust the magnification of the projection system.
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Citations
21 Claims
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1. A lithographic apparatus, comprising:
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an illumination system that supplies a projection beam of radiation;
a patterning system that patterns the projection beam;
a substrate table that supports a substrate; and
a projection system that projects the patterned beam onto a target portion of the substrate and defines a pupil between the patterning system and the substrate table, the projection system comprising, a series of lens components located between the pupil and the substrate table, the lens components comprising, a beam expander that expands the patterned beam from the pupil, and an array of lenses extending transversely relative to the patterned beam, such that each lens of the array of lenses focuses a respective portion of the patterned beam onto a respective part of the target portion of the substrate, wherein a position of at least one of the lens components is adjustable relative to the pupil to adjust a magnification of the projection system. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A device manufacturing method, comprising:
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forming individually controllable elements into an array of individually controllable elements;
using the array of individually controllable elements to impart a projection beam with a pattern;
projecting the patterned beam of radiation onto a target portion of a substrate through a projection system defining a pupil and comprising a series of lens components located between the pupil and a substrate table;
using a beam expander, which is part of the lens components, to expand the patterned beam from the pupil and a lens array extending transversely relative to the patterned beam;
focusing a respective part of the patterned beam using each lens in the lens array onto a respective part of the target portion of the substrate; and
adjusting a magnification of the projection system by adjusting a position of at least one of the lens components relative to the pupil. - View Dependent Claims (13, 14, 15, 16, 17, 18, 19, 20, 21)
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Specification