Niobium oxide-based layers for thin film optical coatings and processes for producing the same
First Claim
1. A thin film optical coating, having a layer comprising sol-gel derived niobium oxide, wherein the layer is capable of providing an index of refraction of at least about 1.90.
0 Assignments
0 Petitions
Accused Products
Abstract
The invention includes a thin film optical coating having a layer comprising sol-gel derived niobium oxide which is capable of providing an index of refraction of at least about 1.90. The invention also includes a thin film optical coating having a layer comprising a sol-gel derived oxide system including niobium oxide and a second oxide component such as aluminum oxide and/or silicon oxide which is capable of providing an index of refraction of from about 1.60 to about 1.90. Also included in the present invention are processes for producing such thin film coatings. In the processes, a substrate is immersed in a mixture comprising niobium chloride and an alcohol, withdrawn from the mixture, and heat-treated. The mixture may also include aluminum precursors and/or silicon precursors. The heat-treatment may occur at various temperatures, including those under 200° C.
-
Citations
21 Claims
- 1. A thin film optical coating, having a layer comprising sol-gel derived niobium oxide, wherein the layer is capable of providing an index of refraction of at least about 1.90.
-
4. A process for producing a thin film optical coating on a substrate, comprising:
-
(a) immersing the substrate in a mixture comprising niobium chloride and an alcohol;
(b) withdrawing the substrate from the mixture to provide the substrate with a coating of the mixture; and
(c) heat-treating the substrate to form a niobium oxide-based layer having an index of refraction of at least about 1.90. - View Dependent Claims (5, 6, 7, 8, 9, 10, 20)
-
- 12. A thin film optical coating, having a layer comprising a sol-gel derived oxide system, the sol-gel derived oxide system comprising niobium oxide, silicon dioxide and aluminum oxide, wherein the layer is capable of providing an index of refraction of from about 1.60 to about 1.90.
-
14. A process for producing a thin film optical coating on a substrate, comprising:
-
(a) immersing the substrate in a mixture comprising niobium chloride, a silicon precursor, an aluminum precursor, and an alcohol, wherein the molar ratio of niobium to silicon is from about 0.9;
1 to about 3.6;
1 and the molar ratio of niobium to aluminum is from about 0.8;
1 to about 3.0;
1;
(b) withdrawing the substrate from the mixture to provide the substrate with a coating of the mixture; and
(c) heat-treating the substrate to form a layer having an index of refraction of from about 1.60 to about 1.90. - View Dependent Claims (15, 16, 17, 18, 21)
-
Specification