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System for detecting warped carriers and associated methods

  • US 20050247541A1
  • Filed: 05/04/2004
  • Published: 11/10/2005
  • Est. Priority Date: 05/04/2004
  • Status: Active Grant
First Claim
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1. A warp detection system for determining warping in a carrier configured to carry substrates for processing, the system comprising:

  • a guide plate configured to guide a path of the carrier during the processing, the guide plate positioned underneath the carrier;

    a plurality of sensors positioned within the guide plate, each of the plurality of sensors configured to measure a distance of a respective area of the carrier from the guide plate; and

    a processing device configured to receive the measured distances and determine warping in the carrier based on differences between the measured distances.

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