MSVD coating process

• US 20050247555A1
• Filed: 05/06/2004
• Published: 11/10/2005
• Est. Priority Date: 05/06/2004
• Status: Active Grant

• Current Assignee: Vitro Flat Glass LLC (Compagnie De Saint-Gobain)
• Original Assignee: PPG Industries Ohio Incorporated (Nouryon BV)
• Inventors: Thiel, James P.
• Granted Patent: US 8,500,965 B2
• Time in Patent Office: Days
• US Class Current: 204/192.260
• CPC Class Codes: C03C 17/3429 at least one of the coatings being a non-oxide coating
• CPC Class Codes: C03C 17/36 at least one coating being a metal
• CPC Class Codes: C03C 17/3605 Coatings of the type glass/metal/inorganic compound
• CPC Class Codes: C03C 17/3644 the metal being silver
• CPC Class Codes: C03C 17/3649 made of metals other than silver
• CPC Class Codes: C03C 17/3689 one oxide layer being obtained by oxidation of a metallic layer
• CPC Class Codes: C03C 17/3694 one layer having a composition gradient through its thickness
• CPC Class Codes: C03C 2218/156 by magnetron sputtering
• CPC Class Codes: C03C 2218/322 Oxidation
• CPC Class Codes: C23C 14/0036 Reactive sputtering
• CPC Class Codes: C23C 14/352 using more than one target C23C14/56 takes precedence

Abstract

The present invention is a method of coating a substrate in a single zone of a MSVD coater wherein the zone includes at least two bays, comprising running a first bay of a zone including a first target in metal mode and running the second bay including a second target in transition or oxide mode, wherein the ΔG of formation of the target oxide being run in transition mode or oxide mode is equal to or less than −160 kcal/mole O₂ or the difference in ΔG between the target being run in transition mode or oxide mode and the target being run in metal mode is at least 60 kcal/mole O₂.

Claims

1. A method of coating a substrate in a single zone of a MSVD coater wherein the zone includes at least two bays, comprising:

a. running a first bay of a zone including a first target in metal mode; and

b. running a second bay of a zone including a second target in transition or oxide mode, wherein the Δ

G of the target being run in transition mode or oxide mode is equal to or less than −

160 kcal/mole O₂ or the difference in Δ

G between the target being run in transition mode or oxide mode and the target being run in metal mode is at least 60 kcal/mole O₂.

2. The method according to claim 1 wherein the first target is selected from gold, copper, silver, titanium, zirconium, hafnium, yttrium and mixtures and alloys thereof.

3. The method according to claim 2 wherein the first target comprises silver.

4. The method according to claim 1 wherein the second target selected from titanium, silicon, tin, zinc, aluminum, silicon, and combinations thereof in transition or oxide mode

5. The method according to claim 4 wherein the second target comprises a mixture of aluminum and silicon.

6. The method according to claim 5 wherein the second target comprises 60 weight percent silicon and 40 weight percent aluminum.

7. The method according to claim 5 wherein the second target comprises 25 weight percent silicon and 75 weight percent aluminum.

8. The method according to claim 5 wherein the second target comprises 90 weight percent silicon and 10 weight percent aluminum.

9. The method according to claim 1 wherein running the second bay includes pumping a reactive gas selected from oxygen or nitrogen into the zone.

10. The method according to claim 1 further comprising running a bay containing a third target comprising a second metal that is different from the first metal in metal mode, the third target is located in a third bay between the first bay and the second bay.

11. The method according to claim 10 wherein the second metal is selected from selected from gold, copper, silver, titanium, zirconium, hafnium, yttrium and mixtures and alloys thereof.

12. The method according to claim 11 wherein the second metal is titanium.

13. The method according to claim 1 wherein the coated substrate is glass.

14. A method of coating a substrate in a single zone of a MSVD coater wherein the zone includes at least two bays, comprising:

a. running a first bay of a zone including a target comprising silver in metal mode; and

b. running a second bay of a zone including a target comprising a mixture of aluminum and silicon in transition mode.

15. The method according to claim 14 used to deposit a layer of alumina/silica over a layer of silver.

16. A method of coating a substrate in a single zone of a MSVD coater wherein the zone includes at least two bays, comprising:

a. running a first bay of a zone including a target comprising titanium in metal mode; and

b. running a second bay of a zone including a target comprising a mixture of aluminum and silicon in transition mode.

17. The method according to claim 16 further comprising heating the substrate after it leaves the zone.