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Thin film piezoelectric resonator and manufacturing process thereof

  • US 20050248232A1
  • Filed: 04/27/2005
  • Published: 11/10/2005
  • Est. Priority Date: 04/30/2004
  • Status: Active Grant
First Claim
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1. A thin film piezoelectric resonator, comprising:

  • a substrate having a cavity; and

    a resonance portion located on the substrate and right above the cavity, wherein the resonance portion includes a lower electrode layer, an upper electrode layer opposite to the lower electrode layer, and a piezoelectric thin film located between the upper electrode layer and the lower electrode layer, wherein a side of the piezoelectric thin film and a side of the lower electrode layer are located in a common plane.

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