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Microelectromechanical system sensor and method for using

  • US 20050248340A1
  • Filed: 05/05/2004
  • Published: 11/10/2005
  • Est. Priority Date: 05/05/2004
  • Status: Active Grant
First Claim
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1. An apparatus, comprising:

  • a movable portion through which a sensing current is to be conducted; and

    a sensing portion coupled to the movable portion, wherein the movable portion is to move in a direction normal to a substrate in response to a magnetic field.

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