Microelectromechanical system sensor and method for using
First Claim
Patent Images
1. An apparatus, comprising:
- a movable portion through which a sensing current is to be conducted; and
a sensing portion coupled to the movable portion, wherein the movable portion is to move in a direction normal to a substrate in response to a magnetic field.
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Abstract
According to some embodiments, an apparatus includes a movable portion through which a sensing current is to be conducted. The movable portion might comprise, for example, a beam or plate suspended above a well in a Microelectromechanical System (MEMS) substrate. The apparatus may also include a sensing portion coupled to the movable portion, and the movable portion and/or sensing portion may move in a direction normal to the substrate in response to a magnetic field.
68 Citations
31 Claims
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1. An apparatus, comprising:
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a movable portion through which a sensing current is to be conducted; and
a sensing portion coupled to the movable portion, wherein the movable portion is to move in a direction normal to a substrate in response to a magnetic field. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
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16. An apparatus, comprising:
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a movable beam through which a sensing current is to be conducted; and
a sensing portion coupled to the movable beam, wherein the movable portion is to move in response to a magnetic field in two orthogonal directions. - View Dependent Claims (17, 18, 19, 20)
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21. A method of sensing an electromagnetic value, comprising:
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providing a sensing current through a movable portion of a sensor; and
measuring an electrical characteristic of a sensing portion coupled to the movable portion when the movable portion moves in a direction normal to a substrate in response to a magnetic field. - View Dependent Claims (22, 23)
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24. A system, comprising:
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a microelectromechanical system sensor, including;
a movable portion through which a sensing current is to be conducted, and a sensing portion coupled to the movable portion, wherein the movable portion is to move in a direction normal to a substrate in response to a magnetic field; and
a sensor dependent device. - View Dependent Claims (25)
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26. An apparatus, comprising:
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a movable portion capable of being in either of a first position and a second position;
an oscillating driver to move the movable portion between the first position and the second position; and
a sensing portion to measure an electrical characteristic associated with the movable portion when the movable portion is moved through a magnetic field. - View Dependent Claims (27, 28)
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29. A method of sensing an electromagnetic value, comprising:
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oscillating a movable portion at a substantially resonate frequency; and
measuring an electrical characteristic associated with the movable portion when a magnetic field is applied to determine the strength of the magnetic field. - View Dependent Claims (30)
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31. A system, comprising:
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a microelectromechanical system sensor, including;
a movable portion capable of being in either of a first position and a second position, an oscillating driver to move the movable portion between the first position and the second position, and a sensing portion to measure an electrical characteristic associated with the movable portion when the movable portion is moved through a magnetic field; and
a sensor dependent device.
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Specification