Sensing film material
First Claim
1. A sensor (30) for sensing a property of a film of material, the sensor (30) comprising first and second electrodes spaced to define a gap (34) therebetween, the film of material being located within the gap (34), during use, characterised in that the width of the gap (34) is different at different positions on the electrode members whereby the sensing characteristics of the sensor (30) are different at different positions on the electrode members.
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Accused Products
Abstract
A sensor 30 has first and second electrodes 32A, 32B spaced to define a gap 34 therebetween. The electrodes are formed on a substrate which can be covered with a film of material. The width of the gap 34 is different at different positions on the electrodes 32. This results in a sensing characteristic which can be made substantially linear, without sensitivity varying with film thickness, which arises from the use of a constant gap width. The sensor can be used to detect or measure film or liquid layer thickness, or solid material deposition.
15 Citations
18 Claims
- 1. A sensor (30) for sensing a property of a film of material, the sensor (30) comprising first and second electrodes spaced to define a gap (34) therebetween, the film of material being located within the gap (34), during use, characterised in that the width of the gap (34) is different at different positions on the electrode members whereby the sensing characteristics of the sensor (30) are different at different positions on the electrode members.
- 17. A machine incorporating a sensor (30) as aforesaid.
Specification