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Interferometry systems and methods of using interferometry systems

  • US 20050248772A1
  • Filed: 04/22/2005
  • Published: 11/10/2005
  • Est. Priority Date: 04/22/2004
  • Status: Active Grant
First Claim
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1. A method, comprising:

  • interferometrically monitoring a distance between an interferometry assembly and a measurement object along each of three different measurement axes while moving the measurement object relative to the interferometry assembly;

    determining values of a first parameter and a second parameter for different positions of the measurement object from the monitored distances, wherein for a given position the first parameter is based on the monitored distances of the measurement object along each of the three different measurement axes at the given position, and for a given position the second parameter is based on the monitored distance of the measurement object along each of two of the measurement axes at the given position; and

    deriving information about a surface figure profile of the measurement object from the first and second parameter values.

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