High throughput image for processing inspection images
First Claim
1. An image processing system for analyzing images of a specimen to determine whether the specimen contains defects, the system comprising:
- a plurality of processors for receiving image data from a specimen and for at least a subset of the processors each analyzing one or more selected patch(es) of such image data to determine whether the specimen has a defect; and
a plurality of buses for coupling the processors together, wherein the bus has the following specifications;
a data rate of about 50 gigabits per second or more and an error rate less than about 10−
16.
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Abstract
Disclosed is an image processing system for analyzing images of a specimen to determine whether the specimen contains defects. The system includes a plurality of processors for receiving image data from a specimen and for analyzing one or more selected patch(es) of such image data to determine whether the specimen has a defect. The system also includes a plurality of buses for coupling the processors together, wherein the bus has the following specifications: a data rate of about 50 gigabits per second or more and an error rate less than about 10−16. In one implementation, the buses are low voltage differential signal type buses, and in another implementation, the buses are hyper transport type buses.
54 Citations
23 Claims
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1. An image processing system for analyzing images of a specimen to determine whether the specimen contains defects, the system comprising:
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a plurality of processors for receiving image data from a specimen and for at least a subset of the processors each analyzing one or more selected patch(es) of such image data to determine whether the specimen has a defect; and
a plurality of buses for coupling the processors together, wherein the bus has the following specifications;
a data rate of about 50 gigabits per second or more and an error rate less than about 10−
16. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
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16. An image processing system for analyzing images of a specimen to determine whether the specimen contains defects, the system comprising:
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a plurality of inspection signal processors for receiving different sets of optical signals obtained from an inspection tool while inspecting a specimen, wherein each inspection signal processors is operable to convert its received set of optical signals into digital image data and output such image data at a particular time slot of a master clock sent to a next inspection signal processors if present;
a distributor processor for receiving the image data from the plurality of inspection signal processors and for dividing the image data into a plurality of image patches; and
a plurality of analyzing processors associated with the distributor, wherein the distributor is further operable distribute selected image patches to selected analyzing processors for parallel processing to determine whether the specimen has a defect. - View Dependent Claims (17, 18, 19, 20, 21, 22, 23)
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Specification