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Multi-component deposition

  • US 20050249888A1
  • Filed: 05/07/2004
  • Published: 11/10/2005
  • Est. Priority Date: 05/07/2004
  • Status: Active Grant
First Claim
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1. A method for depositing a deposition material on a part comprising:

  • placing the part in a deposition chamber;

    vaporizing one or more first components for forming the deposition material by electron beam heating; and

    vaporizing one or more organometallic compounds for providing one or more second components of the deposition material being codeposited on the part with the first components.

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