Multi-component deposition
First Claim
Patent Images
1. A method for depositing a deposition material on a part comprising:
- placing the part in a deposition chamber;
vaporizing one or more first components for forming the deposition material by electron beam heating; and
vaporizing one or more organometallic compounds for providing one or more second components of the deposition material being codeposited on the part with the first components.
4 Assignments
0 Petitions
Accused Products
Abstract
Physical vapor deposition is augmented by chemical vapor deposition from one or more organometallic compounds to deposit multi-component materials. The organometallic compounds may be carbonyls. The process may be used to deposit coatings and repair material on superalloy turbine engine parts.
27 Citations
27 Claims
-
1. A method for depositing a deposition material on a part comprising:
-
placing the part in a deposition chamber;
vaporizing one or more first components for forming the deposition material by electron beam heating; and
vaporizing one or more organometallic compounds for providing one or more second components of the deposition material being codeposited on the part with the first components. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
-
-
18. An apparatus for depositing material on a workpiece comprising:
-
a deposition chamber;
means for vaporizing one or more first deposition material components;
means for vaporizing one or more organometallic compounds for providing one or more second deposition material components; and
a control system coupled to the means for vaporizing one or more first deposition material components and the means for vaporizing one or more organometallic compounds and programmed so as to provide feedback loop control of codeposition of the first and second deposition material components to the workpiece. - View Dependent Claims (19, 20, 21)
-
-
22. An apparatus for depositing deposition material on a workpiece comprising:
-
a deposition chamber;
a first source of one or more first components of the deposition material heated so as to vaporize the first components; and
a second source comprising one or more organometallic compounds providing one or more second components of the deposition material. - View Dependent Claims (23, 24)
-
-
25. A method for codepositing one or more first components and one or more second components comprising:
-
electron beam physical vapor deposition of the one or more first components; and
chemical vapor deposition of the one or more second components from an organometallic compound. - View Dependent Claims (26, 27)
-
Specification