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System and method for identifying a manufacturing tool causing a fault

  • US 20050251365A1
  • Filed: 03/28/2005
  • Published: 11/10/2005
  • Est. Priority Date: 03/29/2004
  • Status: Active Grant
First Claim
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1. A system for identifying a manufacturing tool causing a failure, comprising:

  • a data generating module configured to generate factorial effect data, based on information on a failure lot group, by using an orthogonal array in which a factor column contains maintenance information and operation information as to a plurality of manufacturing tool groups, and in which a trial row specifies main effect information by every combinations of levels in the factor column;

    a chart generating module configured to generate a factorial effect chart based on the factorial effect data;

    a selection module configured to select a plurality of failure lots caused by the same reason for the failure from among the failure lot group, based on the factorial effect chart; and

    an identification module configured to identify a manufacturing tool used as a common tool for the selected plurality of failure lots, based on history information of the manufacturing tool group.

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