System and method for identifying a manufacturing tool causing a fault

• US 20050251365A1
• Filed: 03/28/2005
• Published: 11/10/2005
• Est. Priority Date: 03/29/2004
• Status: Active Grant

• Current Assignee: Kabushiki Kaisha Toshiba (Toshiba Corporation)
• Original Assignee: Kabushiki Kaisha Toshiba (Toshiba Corporation)
• Inventors: Matsushita, Hiroshi, Kadota, Kenichi
• Granted Patent: US 7,197,414 B2
• Time in Patent Office: Days
• US Class Current: 702/185
• CPC Class Codes: G05B 19/4184 characterised by fault tolerance, reliability of production system
• CPC Class Codes: G05B 2219/31356 Automatic fault detection and isolation
• CPC Class Codes: G05B 2219/32222 Fault, defect detection of origin of fault, defect of product
• CPC Class Codes: Y02P 90/02 Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

Abstract

A system for identifying a manufacturing tool causing a failure, includes a data generating module generating factorial effect data, based on information on a failure lot group by using an orthogonal array, a chart generating module generating a factorial effect chart based on the factorial effect data, a selection module selecting failure lots caused by the same reason for a failure from among the failure lot group, based on the factorial effect chart, and an identification module identifying a manufacturing tool used as a common tool for the selected plurality of failure lots, based on history information of the manufacturing tool group.

Claims

1. A system for identifying a manufacturing tool causing a failure, comprising:

a data generating module configured to generate factorial effect data, based on information on a failure lot group, by using an orthogonal array in which a factor column contains maintenance information and operation information as to a plurality of manufacturing tool groups, and in which a trial row specifies main effect information by every combinations of levels in the factor column;

a chart generating module configured to generate a factorial effect chart based on the factorial effect data;

a selection module configured to select a plurality of failure lots caused by the same reason for the failure from among the failure lot group, based on the factorial effect chart; and

an identification module configured to identify a manufacturing tool used as a common tool for the selected plurality of failure lots, based on history information of the manufacturing tool group.

2. The system of claim 1, wherein the man effect information is information for discriminating between a pass lot and a failure lot.

3. The system of claim 1, wherein the failure lot group is a group of failure lots having failure tendencies within the surfaces of substrates, the failure tendencies being the same with one another.

4. The system of claim 1, wherein the factorial effect data indicate a test value for each process.

5. The system of claim 4, wherein the factorial effect chart shows the test value in a separated form of a failure test value and a normal test value for every lot number included in the failure lot group.

6. The system of claim 1, wherein the identification module identifies a manufacturing tool used as a common tool for the selected plurality of failure lots, by a tool-difference analysis.

7. The system of claim 1, further comprising an estimation module configured to estimate the failure lot group, by using an orthogonal array where a factor column contains failure lot identification information, and where a trial row contains main effect information for estimating an optimum condition in association with the factor column.

8. The system of claim 1, further comprising a classification module configured to classify fault data for a lot, based on failure tendencies within surfaces of substrates.

9. The system of claim 1, further comprising an extraction module configured to extract a lot satisfies a designated condition.

10. A system for identifying a manufacturing tool causing a failure, comprising:

a tool database configured to store maintenance information and operation information of a plurality of manufacturing tool groups;

a yield database configured to store yield information on an industrial product;

a failure lot group database configured to store information on a failure lot group estimated based on a test value of a tool-difference analysis calculated using an orthogonal array, in which a factor column contains failure lot identification information included in yield information stored in the yield database, and in which a trial row specifies main effect information by every combinations of levels in the factor column;

a chart generating module configured to generate a factorial effect chart by using the failure lot identification information and failure lot group information stored in the failure lot group database;

a selection module configured to select a plurality of failure lots caused by the same reason for the failure from among the failure lot group information, based on the factorial effect chart; and

an identification module configured to identify a manufacturing tool used as a common tool for the selected plurality of failure lots, based on history information of the manufacturing tool group stored in the tool history information database.

11. The system of claim 10, further comprising a lot selection module configured to select a failure lot.

12. The system of claim 10, further comprising an estimation module configured to estimate a failure lot group, based on a test value of the tool-difference analysis calculated using the orthogonal array.

13. The system of claim 10, further comprising an extraction module configured to extract a failure lot, which satisfies a designated condition, from the yield database.

14. A computer implemented method for identifying a manufacturing tool causing a failure, comprising:

generating factorial effect data, based on information on a failure lot group, by using an orthogonal array in which a factor column contains maintenance information and operation information as to a plurality of manufacturing tool groups, and in which a trial row specifies main effect information by every combinations of levels in the factor column;

generating a factorial effect chart based on the factorial effect data;

selecting a plurality of failure lots caused by the same reason for the failure from among the failure lot group, based on the factorial effect chart; and

identifying a manufacturing tool used as a common tool for the selected plurality of failure lots, based on history information of the manufacturing tool group.

15. The method of claim 14, wherein the main effect information is information for discriminating between a pass lot and a failure lot.

16. The method of claim 14, wherein the failure lot group is estimated using an orthogonal array where a factor column contains failure lot identification information, and where a trial row contains main effect information for estimating an optimum condition in association with the factor column.

17. The method of claim 14, wherein the failure lot group is a group of failure lots having failure tendencies within the surfaces of substrates, the failure tendencies being the same with one another.

18. The method of claim 14, wherein the factorial effect data indicate a test value for each process.

19. The method of claim 18, wherein the factorial effect chart shows the test value in a separated form of a failure test value and a normal test value for every lot number included in the failure lot group.