System and method for identifying a manufacturing tool causing a fault
First Claim
1. A system for identifying a manufacturing tool causing a failure, comprising:
- a data generating module configured to generate factorial effect data, based on information on a failure lot group, by using an orthogonal array in which a factor column contains maintenance information and operation information as to a plurality of manufacturing tool groups, and in which a trial row specifies main effect information by every combinations of levels in the factor column;
a chart generating module configured to generate a factorial effect chart based on the factorial effect data;
a selection module configured to select a plurality of failure lots caused by the same reason for the failure from among the failure lot group, based on the factorial effect chart; and
an identification module configured to identify a manufacturing tool used as a common tool for the selected plurality of failure lots, based on history information of the manufacturing tool group.
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Abstract
A system for identifying a manufacturing tool causing a failure, includes a data generating module generating factorial effect data, based on information on a failure lot group by using an orthogonal array, a chart generating module generating a factorial effect chart based on the factorial effect data, a selection module selecting failure lots caused by the same reason for a failure from among the failure lot group, based on the factorial effect chart, and an identification module identifying a manufacturing tool used as a common tool for the selected plurality of failure lots, based on history information of the manufacturing tool group.
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Citations
19 Claims
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1. A system for identifying a manufacturing tool causing a failure, comprising:
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a data generating module configured to generate factorial effect data, based on information on a failure lot group, by using an orthogonal array in which a factor column contains maintenance information and operation information as to a plurality of manufacturing tool groups, and in which a trial row specifies main effect information by every combinations of levels in the factor column;
a chart generating module configured to generate a factorial effect chart based on the factorial effect data;
a selection module configured to select a plurality of failure lots caused by the same reason for the failure from among the failure lot group, based on the factorial effect chart; and
an identification module configured to identify a manufacturing tool used as a common tool for the selected plurality of failure lots, based on history information of the manufacturing tool group. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A system for identifying a manufacturing tool causing a failure, comprising:
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a tool database configured to store maintenance information and operation information of a plurality of manufacturing tool groups;
a yield database configured to store yield information on an industrial product;
a failure lot group database configured to store information on a failure lot group estimated based on a test value of a tool-difference analysis calculated using an orthogonal array, in which a factor column contains failure lot identification information included in yield information stored in the yield database, and in which a trial row specifies main effect information by every combinations of levels in the factor column;
a chart generating module configured to generate a factorial effect chart by using the failure lot identification information and failure lot group information stored in the failure lot group database;
a selection module configured to select a plurality of failure lots caused by the same reason for the failure from among the failure lot group information, based on the factorial effect chart; and
an identification module configured to identify a manufacturing tool used as a common tool for the selected plurality of failure lots, based on history information of the manufacturing tool group stored in the tool history information database. - View Dependent Claims (11, 12, 13)
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14. A computer implemented method for identifying a manufacturing tool causing a failure, comprising:
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generating factorial effect data, based on information on a failure lot group, by using an orthogonal array in which a factor column contains maintenance information and operation information as to a plurality of manufacturing tool groups, and in which a trial row specifies main effect information by every combinations of levels in the factor column;
generating a factorial effect chart based on the factorial effect data;
selecting a plurality of failure lots caused by the same reason for the failure from among the failure lot group, based on the factorial effect chart; and
identifying a manufacturing tool used as a common tool for the selected plurality of failure lots, based on history information of the manufacturing tool group. - View Dependent Claims (15, 16, 17, 18, 19)
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Specification