Magnetic MEMS device and method of forming thereof

• US 20050252293A1
• Filed: 01/05/2005
• Published: 11/17/2005
• Est. Priority Date: 05/11/2004
• Status: Active Grant

• Current Assignee: Samsung Electronics Co. Ltd.
• Original Assignee: Samsung Electronics Co. Ltd.
• Inventors: Choi, Hyung, Kim, Kwon hee, Won, Jong-hwa, Kwon, Oh-myoung
• Granted Patent: US 7,453,269 B2
• Time in Patent Office: Days
• US Class Current: 73/514.320
• CPC Class Codes: B81B 2201/0235 Accelerometers
• CPC Class Codes: B81B 2201/0264 Pressure sensors
• CPC Class Codes: B81B 2201/0292 Sensors not provided for in B81B2201/0207 - B81B2201/0285
• CPC Class Codes: B81B 3/0021 Transducers for transforming electrical into mechanical energy or vice versa dynamo-electric machines H02K99/00; electrostatic machines H02N1/00; piezoelectric devices H10N30/00
• CPC Class Codes: G01P 15/08 with conversion into electric or magnetic values
• CPC Class Codes: G01P 15/0802 Details
• CPC Class Codes: G01P 15/125 by capacitive pick-up
• CPC Class Codes: G01P 3/486 delivered by photo-electric detectors
• CPC Class Codes: G01P 3/488 delivered by variable reluctance detectors

Abstract

A microelectromechanical system (MEMS) sensor and method for measuring the motion of an intermediate member and a method for making the MEMS sensor. The MEMS sensor includes a substrate, a lower magnetic member disposed on the substrate, a layer disposed over the substrate, an upper magnetic member disposed at a side of the layer facing the lower magnetic member, an intermediate magnetic member magnetically levitated between the lower magnetic member and upper magnetic member; and a component measuring at least one of motion, forces acting on, and a displacement of the intermediate magnetic member.

Claims

1. A microelectromechanical system (MEMS) sensor comprising:

a lower magnetic member;

an upper magnetic member disposed over said lower magnetic member;

an intermediate magnetic member magnetically levitated between said lower magnetic member and upper magnetic member; and

a detector measuring at least one of motion of, forces acting on, and displacement of the intermediate magnetic member with respect to the lower magnetic member and the upper magnetic member.

2. The MEMS sensor of claim 1, wherein the detector comprises:

a first conductive plate disposed at said lower magnetic member;

a first intermediate conductive plate disposed at one side of said intermediate magnetic member facing said first conductive plate;

a second conductive plate disposed at said upper magnetic member; and

a second intermediate conductive plate disposed at another side of said intermediate magnetic member facing said second conductive plate, wherein the displacement of said intermediate magnetic member is determined in accordance with at least one of a current and a resonant frequency measured between said first conductive plate and said second conductive plate.

3. The MEMS sensor of claim 2, wherein said first conductive plate and said first intermediate conductive plate having a first capacitance based on a first distance between said first conductive plate and said first intermediate conductive plate, said second conductive plate and said second intermediate conductive plate having a second capacitance based on a second distance between said second conductive plate and said second intermediate conductive plate, and the at least one of the motion of, the forces acting on, and the displacement of the intermediate magnetic member is determined by measuring a change in at least one of the first and the second capacitances.

4. The MEMS sensor of claim 2 further comprising an electric coupling connecting the first intermediate conductive plate and the second intermediate conductive plate.

5. The MEMS sensor of claim 4, wherein the electric coupling is at least one of a conductor and an inductor.

6. The MEMS sensor of claim 1, wherein the detector comprises:

at least one signal component disposed on said intermediate magnetic member, generating a signal; and

a signal sensor measuring the signal generated by said at least one signal component when said intermediate magnetic member rotates about an axis, to determine at least one of angular velocity and angular acceleration of said intermediate magnetic member.

7. The MEMS sensor of claim 6, wherein said at least one signal component is disposed off-center from the axis and said signal sensor measures the signal when the at least one signal component is proximal to said signal sensor.

8. The MEMS sensor of claim 6, wherein said at least one signal component is a plurality of signal components.

9. The MEMS sensor of claim 6, wherein said at least one signal component is disposed off-center from the axis and said signal sensor measures the signal when the at least one signal component is proximal to said signal sensor.

10. The MEMS sensor of claim 1, wherein the detector comprises:

at least one signal component disposed on said intermediate magnetic member, generating a signal; and

a signal sensor measuring the signal generated by said at least one signal component when said intermediate magnetic member is rotatively displaced about an axis substantially orthogonal to said intermediate magnetic member, to determine at least one of an angular displacement and angular motion of said intermediate magnetic member.

11. The MEMS sensor of claim 10, wherein the detector comprises a plurality of signal components and the at least one of the angular displacement and angular motion is determined in accordance with a number of components proximally passing said signal sensor.

12. The MEMS sensor of claim 1, wherein a first magnetic surface of said lower magnetic member and a first magnetic surface of said intermediate magnetic member facing said lower magnetic member each has a first magnetic polarity and a first magnetic surface of said upper magnetic member and a second magnetic surface of said intermediate magnetic member facing said upper magnetic member each has a second magnetic polarity, and the first magnetic polarity is opposite to the second magnetic polarity to magnetically levitate said intermediate magnetic member between the lower and upper magnetic members.

13. The MEMS sensor of claim 1 further comprising a means for positioning said intermediate magnetic member between the upper and lower magnetic members.

14. The MEMS sensor of claim 13, wherein the means for positioning comprises a spindle disposed through a center hole of said intermediate magnetic member.

15. The MEMS sensor of claim 1, wherein said intermediate magnetic member has a first magnetic surface area, the upper and lower magnetic members have a second magnetic surface area and a third magnetic surface area, respectively, and the first magnetic surface area having a shape different from each of the second and third magnetic surface areas.

16. The MEMS sensor of claim 1, wherein at least one of the upper, intermediate, and lower magnetic members comprises a plurality of discrete magnetic structures.

17. The MEMS sensor of claim 16, wherein the plurality of discrete magnetic structures are pillar-shaped.

18. A method of forming a microelectromechanical system (MEMS) device comprising a lower magnetic member, an intermediate magnetic member, and an upper magnetic member, the method comprising:

applying a first external magnetic field to the lower and the upper magnetic members and said intermediate magnetic member;

inducing magnetic polarities in each of the lower and the upper magnetic members and said intermediate magnetic member in a first orientation;

applying a second external magnetic field to the lower and the upper magnetic members and said intermediate magnetic member; and

reversing a magnetic polarity of only one of i) said intermediate magnetic member and ii) the lower and upper magnetic members to a second orientation.

19. The method of forming the MEMS device of claim 18, wherein a coercivity of the lower and the upper magnetic members is greater than a coercivity of the intermediate magnetic member.

20. The method of forming the MEMS device of claim 18, wherein a coercivity of the lower and the upper magnetic members is less than a coercivity of the intermediate magnetic member.

21. A method of measuring a displacement of an inner member magnetically levitated between a substrate and an upper member of a microelectromechanical system (MEMS) device, the method comprising:

measuring a current and a resonant frequency of the current through said substrate, inner member, and upper member; and

calculating the displacement of the inner member from said current and resonant frequency of said current.

22. The method of claim 21, wherein the displacement is a linear displacement.

23. A method of measuring at least one of a motion and a displacement of a microelectromechanical system (MEMS) device comprising an inner member magnetically levitated between a substrate and an upper member, at least one signal component disposed on said inner member, and a detector disposed on said substrate, the method comprising:

detecting a signal emitted from said at least one signal component when said at least one signal component proximally passes said detector when the inner member rotates; and

calculating the at least one of the motion and the displacement of the inner member from the signal.

24. The method of claim 23, wherein the displacement is angular displacement.

25. A method of measuring an angular motion of a microelectromechanical device comprising an inner member magnetically levitated between a substrate and an upper member, at least one signal component disposed on said inner member, and a detector disposed on said substrate, the method comprising:

detecting a signal emitted from said at least one signal component when said signal component proximally passes said detector when the inner member rotates; and

calculating at least one of angular velocity and angular acceleration of said inner member from the signal.

26. A microelectromechanical system (MEMS) sensor comprising:

a substrate;

a lower magnetic member disposed on said substrate;

a layer disposed over said substrate;

an upper magnetic member disposed at a side of said layer facing said lower magnetic member;

an intermediate magnetic member magnetically levitated between said lower magnetic member and upper magnetic member; and

means for measuring at least one of motion of, forces acting on, and displacement of the intermediate magnetic member.

27. A microelectromechanical system (MEMS) sensor comprising:

a lower magnetic member comprising a lower magnetic surface of a first magnetic polarity;

an upper magnetic member disposed over said lower magnetic member comprising an upper second magnetic surface of a second magnetic polarity;

an intermediate magnetic member magnetically levitated between said lower magnetic member and upper magnetic member, said intermediate magnetic member comprising a first magnetic surface of the first magnetic polarity facing said lower magnetic surface and a second magnetic surface of the second magnetic polarity facing said upper magnetic surface, the first magnetic polarity being opposite to the second magnetic polarity to magnetically levitate said intermediate magnetic member between the lower and upper magnetic members; and

a detector measuring displacement of the intermediate magnetic member with respect to the lower magnetic member and the upper magnetic member, the detector comprising;

a first conductive plate disposed at said lower magnetic member;

a first intermediate conductive plate disposed at one side of said intermediate magnetic member facing said first conductive plate, the first conductive plate and the first intermediate conductive plate forming a first capacitor;

a second conductive plate disposed at said upper magnetic member; and

a second intermediate conductive plate disposed at another side of said intermediate magnetic member facing said second conductive plate, the second conductive plate and the second intermediate conductive plate forming a second capacitor, wherein the displacement of said intermediate magnetic member is determined in accordance with at least one of i) a current measured between said first conductive plate and said second conductive plate;

ii) a resonant frequency measured across said first conductive plate and said second conductive plate; and

iii) a change in at least one of a first capacitance measured at said first capacitor and a second capacitance measured at said second capacitor.

28. The MEMS sensor of claim 27, wherein the first conductive plate is divided into at least two parts and a change of the first capacitance due to at least one of a motion of, forces acting on, and a displacement of the inner member is measured between the at least two parts of the first conductive plate.

29. The MEMS sensor of claim 27, wherein a second conductive plate is divided into at least two or more parts and a change of the second capacitance due to at least one of a motion of, forces acting on, and a displacement of the inner member is measured between the at least two parts of the second conductive plate