Apparatus and a method for forming an alloy layer over a substrate
First Claim
1. A machine readable storage medium containing executable program instructions which when executed cause a system to perform a method comprising:
- controlling introduction of at least two metal constituents into a chamber;
controlling a formation of an alloy from the at least two metal constituents by controlling one of;
(1) introducing the at least two metal constituents into a chamber in which a focused ion beam contacts the two metal constituents to form a first alloy layer over a substrate;
(2) introducing at about the same time at least two precursor gas sources in which each precursor gas source contains a respective one of the at least two metal constituents and the focused ion beam contacts the at least two precursor gases to form a first alloy layer over the substrate, and (3) forming a first layer of a first of the at least two metal constituents and a second layer of a second of the at least two metal constituents a multi-metal layer and performing one of thermal treatment and introducing focused ion beam to at least a portion of the multi-metal layer to form a first alloy layer over a substrate.
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Abstract
One embodiment of the invention involves introducing at least two metals into a chamber for forming an alloy layer over a substrate. This is accomplished by a variety of methods. In one embodiment, at least two metals are mixed and introduced into a chamber in which a focused ion beam contacts the two metals to form at least one alloy layer over a substrate. In another embodiment, at least two precursor gas sources are introduced into the chamber in which each precursor gas source contains a metal. The focused ion beam contacts the two precursor gases to form an alloy layer over the substrate. In yet another embodiment, a second metal layer is formed over a first metal layer to form a multi-metal layer. Thereafter, thermal treatment or introducing a focused ion beam to at least a portion of the multi-metal layer is performed to create at least one alloy layer over the substrate.
53 Citations
6 Claims
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1. A machine readable storage medium containing executable program instructions which when executed cause a system to perform a method comprising:
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controlling introduction of at least two metal constituents into a chamber;
controlling a formation of an alloy from the at least two metal constituents by controlling one of;
(1) introducing the at least two metal constituents into a chamber in which a focused ion beam contacts the two metal constituents to form a first alloy layer over a substrate;
(2) introducing at about the same time at least two precursor gas sources in which each precursor gas source contains a respective one of the at least two metal constituents and the focused ion beam contacts the at least two precursor gases to form a first alloy layer over the substrate, and (3) forming a first layer of a first of the at least two metal constituents and a second layer of a second of the at least two metal constituents a multi-metal layer and performing one of thermal treatment and introducing focused ion beam to at least a portion of the multi-metal layer to form a first alloy layer over a substrate.
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5. The method of claim 8, wherein the method further comprises:
an alloy process to the second alloy layer.
- 6. The machine readable storage medium of claim 10, wherein the alloy process is one of thermal treatment and applying a focused io
Specification