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Capacitance difference detecting circuit and MEMS sensor

  • US 20050253596A1
  • Filed: 09/16/2004
  • Published: 11/17/2005
  • Est. Priority Date: 05/14/2004
  • Status: Active Grant
First Claim
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1. A capacitance difference detecting circuit comprising:

  • a plurality of oscillators having capacitors whose capacitances change according to an external force and generating first oscillating signals according to the capacitances, respectively; and

    a detecting unit detecting a relative difference between the capacitances as a difference between frequencies of the first oscillating signals.

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