Capacitor apparatus of the capacity variable type
0 Assignments
0 Petitions
Accused Products
Abstract
The present invention is directed to a capacitor apparatus of the capacity variable type. This capacitor apparatus is manufactured by Micro Electro-Mechanical System technology, and comprises an insulating substrate (2) in which at least two capacitor electrodes (3), (4) are formed on one surface (2a) in the state where they are insulated each other, an actuator (5) formed by insulating material and having an external shape to bridge over the respective capacitor electrodes (3), (4), the actuator (5) being such that a conductor which respectively constitutes capacitors between the conductor (6) and these capacitor electrodes (3), (4), and drive means (7) for allowing this actuator (5) to undergo an operation to come into contact with one principal surface (2a) of the insulating substrate (2) or to become away therefrom.
16 Citations
13 Claims
-
1-9. -9. (canceled)
-
10. A capacitor apparatus of the capacity variable type comprising:
-
an insulation substrate in which at least two capacitor electrodes are formed on one surface in the state where insulation therebetween is maintained with each other;
an actuator formed by an insulating material, and having an external shape to bridge over the respective capacitor electrodes on one surface the actuator being adapted so that a common conductor respectively constituting capacitors are formed between the conductor and the respective capacitor electrodes; and
drive means for carrying out an operation to allow the actuator to be in contact with the principal surface of the insulating substrate, or to allow it to be away therefrom, wherein the actuator adjusts opposite spacing between the actuator and the insulating substrate by the drive means, whereby capacitance adjustment of the respective capacitors is carried out; and
wherein the drive means is composed of a fixed electrode for drive formed on the principal surface of the insulating substrate in the state where insulation with respect to the capacitor electrode is maintained, and a movable electrode for drive formed at the actuator in correspondence with the drive electrode in the state where insulation with respect to the conductor is maintained, and wherein the actuator is driven by electrostatic force produced between the drive fixed electrode and he drive movable electrode by application of drive voltage;
wherein at least three capacitor electrodes or more are formed on the insulating substrate, and wherein either one of capacitor electrodes is caused to be a common electrode to constitute capacitor by this common electrode and other capacitor electrodes to thereby constitute multiple operating capacitor which carries out interlocking operation each other by the movable electrode and further wherein at least one capacitor electrode has a draw-out portion. - View Dependent Claims (11)
-
-
12. A capacitor apparatus of the capacity variable type comprising:
-
an insulation substrate in which at least two capacitor electrodes are formed on one surface in the state where insulation therebetween is maintained with each other;
an actuator formed by an insulating material, and having an external shape to bridge over the respective capacitor electrodes on one surface, the actuator being adapted so that a common conductor respectively constituting capacitors are formed between the conductor and the respective capacitor electrodes; and
drive means for carrying out an operation to allow the actuator to be in contact with the principal surface of the insulating substrate or to allow it to be away therefrom, wherein the actuator adjusts opposite spacing between the actuator and the insulating substrate by the drive means, whereby capacitance adjustment of the respective capacitors is carried out; and
wherein the drive means is composed of a fixed electrode for drive formed on the principal surface of the insulating substrate in the state where insulation with respect to the capacitor electrode is maintained, and a movable electrode for drive formed at the actuator in correspondence with the drive electrode in the state where insulation with respect to the conductor is maintained, and wherein the actuator is driven by electrostatic force produced between the drive fixed electrode and he drive movable electrode by application of drive voltage; and
wherein at least three capacitor electrodes or more are formed on the insulating layer, and at least two movable electrodes or more are formed at the actuator in the state where insulation therebetween is maintained with each other, and wherein either two capacitor electrodes or more are caused to be common electrodes to constitute capacitor electrode by the common electrodes and other capacitor electrode or electrodes to thereby constitute multiple operating capacitor which carries out interlocking operation each other by the movable electrode and further wherein at least one capacitor electrode has a draw-out portion. - View Dependent Claims (13)
-
Specification