Apparatus and methods for curing ink on a substrate using an electron beam

• US 20050255253A1
• Filed: 02/18/2005
• Published: 11/17/2005
• Est. Priority Date: 05/13/2004
• Status: Abandoned Application

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Kurita, Shinichi, Shang, Quanyuan, White, John M., Beer, Emanuel, Ji, Hongbin, Jozwiak, Janusz, Sze, Fan Cheung, Huang, Inchen
• Application Number:
  US11/061,121
• Publication Number:
  US 20050255253A1
• Time in Patent Office: Days
• US Class Current: 427/496
• CPC Class Codes: B05D 3/0486 Operating the coating or treatment in a controlled atmosphere
• CPC Class Codes: B05D 3/068 using ionising radiations (gamma, X, electrons)
• CPC Class Codes: B41J 11/0015 for treating before, during or after printing or for uniform coating or laminating the copy material before or after printing selective coating B41J2/2114
• CPC Class Codes: B41M 7/0072 using mechanical wave energy, e.g. ultrasonics; using magnetic or electric fields, e.g. electric discharge, plasma
• CPC Class Codes: B41M 7/0081 using electromagnetic radiation or waves, e.g. ultraviolet radiation, electron beams

Abstract

In a first aspect, a method of curing ink on a substrate is provided. The method includes the steps of (1) placing a substrate on a support stage of an ink curing chamber; and (2) scanning an electron beam over a surface of the substrate within the ink curing chamber so as to cure ink present on the substrate. Numerous other aspects are provided.

Claims

1. A method of curing ink on a substrate comprising:

placing a substrate on a support stage of an ink curing chamber; and

scanning an electron beam over a surface of the substrate within the ink curing chamber so as to cure ink present on the substrate.

2. The method of claim 1 wherein scanning the electron beam over the surface of the substrate comprises moving an electron beam emitter over the surface of the substrate.

3. The method of claim 1 wherein scanning the electron beam over the surface of the substrate comprises moving a plurality of electron beam emitters over the surface of the substrate.

4. The method of claim 2 wherein moving the electron beam emitter comprises moving the electron beam emitter in at least one of an x-axis direction and a y-axis direction.

5. The method of claim 1 further comprising detecting a level of oxygen in the ink curing chamber.

6. The method of claim 5 further comprising determining if the level of oxygen is above a predetermined level, and if so at least one of purging the ink curing chamber and disabling the electron beam.

7. The method of claim 6 wherein disabling the electron beam comprises turning off the electron beam.

8. The method of claim 6 wherein disabling the electron beam comprises preventing an activation of the electron beam.

9. The method of claim 1 further comprising detecting a level of ozone in the ink curing chamber.

10. The method of claim 9 further comprising determining if the level of ozone is above a predetermined level, and if so at least one of purging the ink curing chamber and turning off the electron beam.

11. The method of claim 1 further comprising detecting a level of x-ray leakage from the ink curing chamber.

12. The method of claim 11 further comprising determining if the level of x-ray leakage is above a predetermined level, and if so turning off the electron beam.

13. The method of claim 1 further comprising detecting an open or unlocked condition of a door of the ink curing chamber.

14. The method of claim 13 further comprising determining if the door of the ink curing chamber is open or unlocked and, if so, disabling the electron beam.

15. The method of claim 1 further comprising purging the ink curing chamber with an inert gas during scanning of the substrate.

16. The method of claim 15 wherein purging the ink curing chamber with an inert gas during scanning of the substrate comprises purging the ink curing chamber with nitrogen.

17. An apparatus for curing ink, comprising:

a chamber having;

an electron beam emitter adapted to emit an electron beam; and

an electron beam emitter positioning device, wherein the electron beam emitter positioning device is adapted to support the electron beam emitter at a distance above a surface of a substrate containing ink and move the electron beam emitter so as to scan an electron beam over the surface of the substrate and cure ink present on the substrate.

18. The apparatus of claim 17, further comprising a controller adapted to control operation of the apparatus.

19. The apparatus of claim 18, wherein the controller is adapted to control the electron beam emitter positioning device.

20. The apparatus of claim 17 further comprising a plurality of electron beam emitters each adapted to scan an electron beam over the surface of the substrate.

21. The apparatus of claim 17 wherein the electron beam emitter positioning device is adapted to move the electron beam emitter in at least one of an x-axis direction and a y-axis direction.

22. The apparatus of claim 17 further comprising an oxygen detector adapted to detect a level of oxygen in the ink curing chamber.

23. The apparatus of claim 22 further comprising a controller coupled to the oxygen detector and adapted to determine if the level of oxygen is above a predetermined level, and if so initiate at least one of purging the ink curing chamber and disabling the electron beam.

24. The apparatus of claim 17 further comprising an ozone detector adapted to detect a level of ozone in the ink curing chamber.

25. An apparatus for curing ink, comprising:

a chamber having;

an electron beam emitter adapted to emit an electron beam;

an electron beam emitter positioning device, wherein the electron beam emitter positioning device is adapted to support the electron beam emitter at a distance above a surface of a substrate containing ink and move the electron beam emitter so as to scan an electron beam over the surface of the substrate and cure ink present on the substrate.

an ozone detector adapted to detect a level of ozone in the ink curing chamber;

a controller coupled to the ozone detector and adapted to receive a signal from the ozone detector, determine if the level of ozone is above a predetermined level, and if so activate at least one of purging the ink curing chamber and turning off the electron beam;

an x-ray detector coupled to the controller and adapted to detect a level of x-ray leakage from the ink curing chamber, wherein the controller is adapted to receive a signal from the x-ray detector, determine if the level of x-ray leakage is above a predetermined level, and if so initiate turning off the electron beam;

an interlock system coupled to the controller and adapted to detect an open or unlocked condition of a door of the ink curing chamber, wherein the controller is adapted to receive a signal indicating whether the door of the ink curing chamber is open or unlocked and, if so, initiate turning off the electron beam; and

a purging system coupled to the controller and adapted to purge the ink curing chamber with an inert gas in response to an activation signal from the controller,

wherein the electron beam emitter positioning device is adapted to remain at a constant z-axis position during substrate load/unload operations,

wherein the apparatus further includes a stage adapted to support the substrate, and

wherein the stage is adapted to be lowered so as to allow stationary lift pins to protrude through the stage, support the substrate, and provide clearance above and below the substrate when the stage is lowered.