System for amplifying optical detection of cantilever deflection
First Claim
Patent Images
1. A sensor system, comprising:
- a cantilever having a first end and a second end, the first end being held at a first fixed location and the second end being free to move; and
a reflective membrane having a first end and a second end, the first end being held at a second fixed location and the second end being attached to the cantilever.
2 Assignments
0 Petitions
Accused Products
Abstract
A sensor system configured to amplify cantilever deflection, having: a reflective membrane connected to a cantilever, wherein the reflective membrane rotates more than the cantilever when the cantilever deflects. A sensor system, including: a cantilever having a first end and a second end, the first end being held at a first fixed location and the second end being free to move; and a reflective membrane having a first end and a second end, the first end being held at a second fixed location and the second end being attached to the cantilever.
49 Citations
28 Claims
-
1. A sensor system, comprising:
-
a cantilever having a first end and a second end, the first end being held at a first fixed location and the second end being free to move; and
a reflective membrane having a first end and a second end, the first end being held at a second fixed location and the second end being attached to the cantilever. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 23)
-
-
14. A sensor system configured to amplify cantilever deflection, comprising:
a reflective membrane connected to a cantilever, wherein the reflective membrane rotates more than the cantilever when the cantilever deflects. - View Dependent Claims (15, 16, 17)
-
18. A method of sensing cantilever deflection, comprising:
-
directing a beam of incident light towards a reflective membrane, wherein a first end of the reflective membrane is held at a fixed location and a second end of the reflective membrane is attached to a cantilever;
deflecting the cantilever; and
detecting movement of a beam of light reflected by the reflective membrane. - View Dependent Claims (19, 20, 21, 22)
-
-
24. A deflectable two-part sensor, comprising:
-
a first part being stiff which deflects in response to bonding thereon; and
a second part being compliant and optically reflective, wherein the first and second parts are connected together such that deflection of the first part results in amplification of the deflection of the second part. - View Dependent Claims (25, 26, 27, 28)
-
Specification