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System for amplifying optical detection of cantilever deflection

  • US 20050255448A1
  • Filed: 07/06/2004
  • Published: 11/17/2005
  • Est. Priority Date: 05/13/2004
  • Status: Abandoned Application
First Claim
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1. A sensor system, comprising:

  • a cantilever having a first end and a second end, the first end being held at a first fixed location and the second end being free to move; and

    a reflective membrane having a first end and a second end, the first end being held at a second fixed location and the second end being attached to the cantilever.

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