Laser irradiation method and method for manufacturing semiconductor device using the same

• US 20050255716A1
• Filed: 04/18/2005
• Published: 11/17/2005
• Est. Priority Date: 04/28/2004
• Status: Active Grant

• Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Original Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Inventors: Yamamoto, Yoshiaki, Tanaka, Koichiro
• Granted Patent: US 7,547,866 B2
• Time in Patent Office: Days
• US Class Current: 438/795
• CPC Class Codes: B23K 26/04 Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
• CPC Class Codes: B23K 26/0738 into a linear shape
• CPC Class Codes: H01L 21/02532 Silicon, silicon germanium, germanium
• CPC Class Codes: H01L 21/02686 Pulsed laser beam
• CPC Class Codes: H01L 21/02689 using particle beams
• CPC Class Codes: H01L 21/268 using electromagnetic radiation, e.g. laser radiation
• CPC Class Codes: H01L 27/1285 using control of the annealing or irradiation parameters, e.g. using different scanning direction or intensity for different transistors

Abstract

The present invention is to provide a laser irradiation method for performing homogeneous laser irradiation to the irradiation object even when the thickness of the irradiation object is not even. In the case of irradiating the irradiation object having uneven thickness, the laser irradiation is performed while keeping the distance between the irradiation object and the lens for condensing the laser beam on the surface of the irradiation object constant by using an autofocusing mechanism. In particular, when the irradiation object is irradiated with the laser beam by moving the irradiation object relative to the laser beam in the first direction and the second direction of the beam spot formed on the irradiation surface, the distance between the irradiation object and the lens is controlled by the autofocusing mechanism before the irradiation object is moved in the first and second directions.

Claims

1. A laser irradiation method comprising:

emitting a first laser beam from a first laser oscillator;

forming a beam spot by condensing the first laser beam with a lens to make the first laser beam incident vertically into a surface of an irradiation object; and

irradiating the irradiation object with the first laser beam by moving the irradiation object relative to the first laser beam;

wherein a distance between the irradiation object and the lens is controlled by an autofocusing mechanism before the irradiation object is moved.

4. The laser irradiation method according to claim 1,

wherein a contact displacement sensor is used as the autofocusing mechanism.

5. The laser irradiation method according to claim 1,

wherein the autofocusing mechanism comprises a second laser oscillator for emitting a second laser beam, and

wherein the distance between the lens and the irradiation object is controlled by making the second laser beam incident into the surface of the irradiation object and detecting the second laser beam reflected on the surface of the irradiation object.

6. The laser irradiation method according to claim 5,

wherein the second laser beam is incident obliquely into the irradiation object.

7. The laser irradiation method according to claim 5,

wherein the second laser beam reflected on the surface of the irradiation object is detected by four-array photodetectors, a CCD, or a PSD.

2. A laser irradiation method comprising:

emitting a first laser beam from a first laser oscillator;

forming a beam spot by condensing the first laser beam with a lens to make the first laser beam incident vertically into a surface of an irradiation object where a swell exists along a first direction; and

irradiating the irradiation object with the first laser beam by moving the irradiation object relative to the first laser beam in the first direction and a second direction perpendicular to the first direction;

wherein a distance between the lens and the irradiation object is controlled by an autofocusing mechanism before the irradiation object is moved in the second direction.

42. The laser irradiation method according to claim 2,

wherein a contact displacement sensor is used as the autofocusing mechanism.

43. The laser irradiation method according to claim 2,

wherein the autofocusing mechanism comprises a second laser oscillator for emitting a second laser beam, and

wherein the distance between the lens and the irradiation object is controlled by making the second laser beam incident into the surface of the irradiation object and detecting the second laser beam reflected on the surface of the irradiation object.

44. The laser irradiation method according to claim 43,

wherein the second laser beam is incident obliquely into the irradiation object.

45. The laser irradiation method according to claim 43,

wherein the second laser beam reflected on the surface of the irradiation object is detected by four-array photodetectors, a CCD, or a PSD.

3. A laser irradiation method comprising:

emitting a first laser beam from a laser oscillator;

forming a beam spot by condensing the first laser beam with a lens to make the first laser beam incident vertically into a surface of an irradiation object where a swell exists along a first direction; and

irradiating the irradiation object with the first laser beam by moving the irradiation object relative to the first laser beam in the first direction and a second direction perpendicular to the first direction;

wherein a distance between the lens and the irradiation object is controlled by an autofocusing mechanism when the irradiation object is moved in the first direction.

46. The laser irradiation method according to claim 3,

wherein a contact displacement sensor is used as the autofocusing mechanism.

47. The laser irradiation method according to claim 3,

wherein the autofocusing mechanism comprises a second laser oscillator for emitting a second laser beam, and

wherein the distance between the lens and the irradiation object is controlled by making the second laser beam incident into the surface of the irradiation object and detecting the second laser beam reflected on the surface of the irradiation object.

48. The laser irradiation method according to claim 47,

wherein the second laser beam is incident obliquely into the irradiation object.

49. The laser irradiation method according to claim 47,

wherein the second laser beam reflected on the surface of the irradiation object is detected by four-array photodetectors, a CCD, or a PSD.

8. A laser irradiation method comprising:

emitting a first laser beam from a first laser oscillator;

forming a beam spot by condensing the first laser beam with a lens to make the first laser beam incident obliquely into a surface of an irradiation object; and

irradiating the irradiation object with the first laser beam by moving the irradiation object relative to the first laser beam;

wherein a distance between the irradiation object and the lens is controlled by an autofocusing mechanism before the irradiation object is moved.

11. The laser irradiation method according to claim 8,

wherein a contact displacement sensor is used as the autofocusing mechanism.

12. The laser irradiation method according to claim 8,

wherein the autofocusing mechanism comprises a second laser oscillator for emitting a second laser beam, and

wherein the distance between the irradiation object and the lens is controlled by making the second laser beam incident into the surface of the irradiation object and detecting the second laser beam reflected on the surface of the irradiation object.

13. The laser irradiation method according to claim 12,

wherein the second laser beam reflected on the surface of the irradiation object is detected by four-array photodetectors, a CCD, or a PSD.

14. The laser irradiation method according to claim 8,

wherein the autofocusing mechanism controls the distance between the irradiation object and the lens by detecting the first laser beam reflected on the surface of the irradiation object.

15. The laser irradiation object according to claim 14,

wherein the first laser beam is detected by four-array photodetectors, a CCD, or a PSD.

19. The laser irradiation method according to claim 8,

wherein the first laser oscillator is a YAG laser, a YVO₄ laser, a GdVO₄ laser, a YLF laser, or an Ar laser.

20. The laser irradiation method according to claim 8,

wherein the first laser oscillator is a pulsed laser having a pulse width of several tens ps or less.

9. A laser irradiation method comprising:

emitting a first laser beam from a first laser oscillator;

forming a beam spot by condensing the first laser beam with a lens to make the first laser beam incident obliquely into a surface of an irradiation object where a swell exists along a first direction; and

irradiating the irradiation object with the first laser beam by moving the irradiation object relative to the first laser beam in the first direction and a second direction perpendicular to the first direction;

wherein a distance between the irradiation object and the lens is controlled by an autofocusing mechanism before the irradiation object is moved in the second direction.

16. The laser irradiation method according to claim 9,

wherein the beam spot is shaped into a linear, elliptical, or rectangular spot with a short side and a long side, and

wherein the beam spot is formed so that the long side is parallel to the first direction.

17. The laser irradiation method according to claim 9,

wherein the distance between the irradiation object and the lens is controlled by moving the irradiation object and the lens in a third direction perpendicular to the first and second directions.

18. The laser irradiation method according to claim 9,

wherein the irradiation object is moved relative to the first laser beam more slowly in the first direction than in the second direction.

50. The laser irradiation method according to claim 9,

wherein a contact displacement sensor is used as the autofocusing mechanism.

51. The laser irradiation method according to claim 9,

wherein the autofocusing mechanism comprises a second laser oscillator for emitting a second laser beam, and

wherein the distance between the irradiation object and the lens is controlled by making the second laser beam incident into the surface of the irradiation object and detecting the second laser beam reflected on the surface of the irradiation object.

52. The laser irradiation method according to claim 51,

wherein the second laser beam reflected on the surface of the irradiation object is detected by four-array photodetectors, a CCD, or a PSD.

53. The laser irradiation method according to claim 9,

wherein the autofocusing mechanism controls the distance between the irradiation object and the lens by detecting the first laser beam reflected on the surface of the irradiation object.

54. The laser irradiation object according to claim 53,

wherein the first laser beam is detected by four-array photodetectors, a CCD, or a PSD.

63. The laser irradiation method according to claim 9,

wherein the first laser oscillator is a YAG laser, a YVO₄ laser, a GdVO₄ laser, a YLF laser, or an Ar laser.

64. The laser irradiation method according to claim 9,

wherein the first laser oscillator is a pulsed laser having a pulse width of several tens ps or less.

10. A laser irradiation method comprising:

emitting a first laser beam from a first laser oscillator;

forming a beam spot on a surface of an irradiation object by condensing the first laser beam with a lens to make the first laser beam incident obliquely into the surface of the irradiation object where a swell exists along a first direction; and

irradiating the irradiation object with the first laser beam by moving the irradiation object relative to the first laser beam in the first direction and in a second direction perpendicular to the first direction;

wherein a distance between the irradiation object and the lens is controlled by an autofocusing mechanism when the irradiation object is moved in the first direction.

55. The laser irradiation method according to claim 10,

wherein a contact displacement sensor is used as the autofocusing mechanism.

56. The laser irradiation method according to claim 10,

wherein the autofocusing mechanism comprises a second laser oscillator for emitting a second laser beam, and

wherein the distance between the irradiation object and the lens is controlled by making the second laser beam incident into the surface of the irradiation object and detecting the second laser beam reflected on the surface of the irradiation object.

57. The laser irradiation method according to claim 56,

wherein the second laser beam reflected on the surface of the irradiation object is detected by four-array photodetectors, a CCD, or a PSD.

58. The laser irradiation method according to claim 10,

wherein the autofocusing mechanism controls the distance between the irradiation object and the lens by detecting the first laser beam reflected on the surface of the irradiation object.

59. The laser irradiation object according to claim 58,

wherein the first laser beam is detected by four-array photodetectors, a CCD, or a PSD.

60. The laser irradiation method according to claim 10,

wherein the beam spot is shaped into a linear, elliptical, or rectangular spot with a short side and a long side, and

wherein the beam spot is formed so that the long side is parallel to the first direction.

61. The laser irradiation method according to claim 10,

wherein the distance between the irradiation object and the lens is controlled by moving the irradiation object and the lens in a third direction perpendicular to the first and second directions.

62. The laser irradiation method according to claim 10,

wherein the irradiation object is moved relative to the first laser beam more slowly in the first direction than in the second direction.

65. The laser irradiation method according to claim 10,

wherein the first laser oscillator is a YAG laser, a YVO₄ laser, a GdVO₄ laser, a YLF laser, or an Ar laser.

66. The laser irradiation method according to claim 10,

wherein the first laser oscillator is a pulsed laser having a pulse width of several tens ps or less.

21. A method for manufacturing a semiconductor device comprising:

emitting a first laser beam from a first laser oscillator;

forming a beam spot by condensing the first laser beam with a lens to make the first laser beam incident vertically into a surface of a semiconductor film; and

irradiating the semiconductor film with the first laser beam by moving the semiconductor film relative to the first laser beam so as to anneal the semiconductor film;

wherein a distance between the semiconductor film and the lens is controlled by an autofocusing mechanism before the semiconductor film is moved.

24. The method for manufacturing a semiconductor device according claim 21,

wherein a contact displacement sensor is used as the autofocusing mechanism.

25. The method for manufacturing a semiconductor device according to claim 21,

wherein the autofocusing mechanism comprises a second laser oscillator for emitting a second laser beam;

wherein the distance between the semiconductor film and the lens is controlled by making the second laser beam emitted from the autofocusing mechanism incident into the surface of the semiconductor film and detecting the second laser beam reflected on the surface of the semiconductor film.

26. The method for manufacturing a semiconductor device according to claim 25,

wherein the second laser beam is incident obliquely into the semiconductor film.

27. The method for manufacturing a semiconductor device according to claim 25,

wherein the second laser beam reflected on the surface of the semiconductor film is detected by four-array photodetectors, a CCD, or a PSD.

22. A method for manufacturing a semiconductor device comprising:

emitting a first laser beam from a first laser oscillator;

forming a beam spot by condensing the first laser beam with a lens to make the first laser beam incident vertically into a surface of a semiconductor film where a swell exists along a first direction; and

irradiating the semiconductor film with the first laser beam by moving the semiconductor film relative to the first laser beam in the first direction and a second direction perpendicular to the first direction so as to anneal the semiconductor film;

wherein a distance between the semiconductor film and the lens is controlled by an autofocusing mechanism before the semiconductor film is moved in the second direction.

67. The method for manufacturing a semiconductor device according claim 22,

wherein a contact displacement sensor is used as the autofocusing mechanism.

68. The method for manufacturing a semiconductor device according to claim 22,

wherein the autofocusing mechanism comprises a second laser oscillator for emitting a second laser beam;

wherein the distance between the semiconductor film and the lens is controlled by making the second laser beam emitted from the autofocusing mechanism incident into the surface of the semiconductor film and detecting the second laser beam reflected on the surface of the semiconductor film.

69. The method for manufacturing a semiconductor device according to claim 68,

wherein the second laser beam is incident obliquely into the semiconductor film.

70. The method for manufacturing a semiconductor device according to claim 68,

wherein the second laser beam reflected on the surface of the semiconductor film is detected by four-array photodetectors, a CCD, or a PSD.

23. A method for manufacturing a semiconductor device comprising:

emitting a first laser beam from a first laser oscillator;

forming a beam spot by condensing the first laser beam with a lens to make the first laser beam incident vertically into a surface of a semiconductor film where a swell exists along a first direction; and

irradiating the semiconductor film with the first laser beam by moving the semiconductor film relative to the first laser beam in the first direction and a second direction perpendicular to the first direction so as to anneal the semiconductor film;

wherein a distance between the semiconductor film and the lens is controlled by an autofocusing mechanism when the semiconductor film is moved in the first direction.

71. The method for manufacturing a semiconductor device according claim 23,

wherein a contact displacement sensor is used as the autofocusing mechanism.

72. The method for manufacturing a semiconductor device according to claim 23,

wherein the autofocusing mechanism comprises a second laser oscillator for emitting a second laser beam;

wherein the distance between the semiconductor film and the lens is controlled by making the second laser beam emitted from the autofocusing mechanism incident into the surface of the semiconductor film and detecting the second laser beam reflected on the surface of the semiconductor film.

73. The method for manufacturing a semiconductor device according to claim 72,

wherein the second laser beam is incident obliquely into the semiconductor film.

74. The method for manufacturing a semiconductor device according to claim 72,

wherein the second laser beam reflected on the surface of the semiconductor film is detected by four-array photodetectors, a CCD, or a PSD.

28. A method for manufacturing a semiconductor device comprising:

emitting a first laser beam from a first laser oscillator;

forming a beam spot by condensing the first laser beam with a lens to make the first laser beam incident obliquely into a surface of a semiconductor film; and

irradiating the semiconductor film with the first laser beam by moving the semiconductor film relative to the first laser beam so as to anneal the semiconductor film;

wherein a distance between the semiconductor film and the lens is controlled by an autofocusing mechanism before the semiconductor film is moved.

31. The method for manufacturing a semiconductor device according to claim 28,

wherein the semiconductor film is provided over a glass substrate having a swell along one direction.

32. The method for manufacturing a semiconductor device according to claim 28,

wherein a contact displacement sensor is used as the autofocusing mechanism.

33. The method for manufacturing a semiconductor device according to claim 28,

wherein the autofocusing mechanism comprises a second laser oscillator for -emitting a second laser beam, and

wherein the distance between the semiconductor film and the lens is controlled by making the second laser beam emitted from the autofocusing mechanism incident into the surface of the semiconductor film and detecting the second laser beam reflected on the surface of the semiconductor film.

34. The method for manufacturing a semiconductor device according to claim 33,

wherein the first laser beam which is emitted from the autofocusing mechanism and reflected on the surface of the semiconductor film is detected by four-array photodetectors, a CCD, or a PSD.

35. The method for manufacturing a semiconductor device according to claim 28,

wherein the autofocusing mechanism controls the distance between the semiconductor film and the lens by detecting the first laser beam reflected on the surface of the semiconductor film.

36. The method for manufacturing a semiconductor device according to claim 35,

wherein the second laser beam reflected on the surface of the semiconductor film is detected by four-array photodetectors, a CCD, or a PSD.

40. The method for manufacturing a semiconductor device according to claim 28,

wherein the first laser oscillator is a YAG laser, a YVO₄ laser, a GdVO₄ laser, a YLF laser, or an Ar laser.

41. The method for manufacturing a semiconductor device according to claim 28,

wherein the first laser oscillator is a pulsed laser having a pulse width of several tens ps or less.

29. A method for manufacturing a semiconductor device comprising:

emitting a first laser beam from a first laser oscillator;

forming a beam spot by condensing the first laser beam with a lens to make the first laser beam incident obliquely into a surface of a semiconductor film where a swell exists along a first direction; and

irradiating the semiconductor film with the first laser beam by moving the semiconductor film relative to the first laser beam in the first direction and a second direction perpendicular to the first direction so as to anneal the semiconductor film;

wherein a distance between the semiconductor film and the lens is controlled by an autofocusing mechanism before the semiconductor film is moved in the second direction.

37. The method for manufacturing a semiconductor device according to claim 29,

wherein the beam spot is shaped into a linear, elliptical, or rectangular spot having a long side and a short side, and

wherein the beam spot is provided so that the long side of the beam spot is parallel to the first direction.

38. The method for manufacturing a semiconductor device according to claim 29,

wherein the distance between the semiconductor film and the lens is controlled by moving the semiconductor film or the lens in a third direction perpendicular to both of the first and second directions.

39. The method for manufacturing a semiconductor device according to claim 29,

wherein the semiconductor film is moved relative to the first laser beam more slowly in the first direction than in the second direction.

75. The method for manufacturing a semiconductor device according to claim 29,

wherein a contact displacement sensor is used as the autofocusing mechanism.

76. The method for manufacturing a semiconductor device according to claim 29,

wherein the autofocusing mechanism comprises a second laser oscillator for emitting a second laser beam, and

wherein the distance between the semiconductor film and the lens is controlled by making the second laser beam emitted from the autofocusing mechanism incident into the surface of the semiconductor film and detecting the second laser beam reflected on the surface of the semiconductor film.

77. The method for manufacturing a semiconductor device according to claim 76,

wherein the first laser beam which is emitted from the autofocusing mechanism and reflected on the surface of the semiconductor film is detected by four-array photodetectors, a CCD, or a PSD.

78. The method for manufacturing a semiconductor device according to 29,

wherein the autofocusing mechanism controls the distance between the semiconductor film and the lens by detecting the first laser beam reflected on the surface of the semiconductor film.

79. The method for manufacturing a semiconductor device according to claim 78,

wherein the second laser beam reflected on the surface of the semiconductor film is detected by four-array photodetectors, a CCD, or a PSD.

88. The method for manufacturing a semiconductor device according to claim 29,

wherein the first laser oscillator is a YAG laser, a YVO₄ laser, a GdVO₄ laser, a YLF laser, or an Ar laser.

89. The method for manufacturing a semiconductor device according to claim 29,

wherein the first laser oscillator is a pulsed laser having a pulse width of several tens ps or less.

90. The method for manufacturing a semiconductor device according to claim 29,

wherein the semiconductor film is provided over a glass substrate having a swell along one direction.

30. A method for manufacturing a semiconductor device comprising:

emitting a first laser beam from a first laser oscillator;

forming a beam spot by condensing the first laser beam with a lens to make the first laser beam incident obliquely into a surface of a semiconductor film where a swell exists along a first direction; and

by irradiating the semiconductor film with the first laser beam while moving the semiconductor film relative to the first laser beam in the first direction and a second direction perpendicular to the first direction so as to anneal the semiconductor film;

wherein a distance between the semiconductor film and the lens is controlled by an autofocusing mechanism when the semiconductor film is moved in the first direction.

80. The method for manufacturing a semiconductor device according to claim 30,

wherein a contact displacement sensor is used as the autofocusing mechanism.

81. The method for manufacturing a semiconductor device according to claim 30,

wherein the autofocusing mechanism comprises a second laser oscillator for emitting a second laser beam, and

wherein the distance between the semiconductor film and the lens is controlled by making the second laser beam emitted from the autofocusing mechanism incident into the surface of the semiconductor film and detecting the second laser beam reflected on the surface of the semiconductor film.

82. The method for manufacturing a semiconductor device according to claim 81,

wherein the first laser beam which is emitted from the autofocusing mechanism and reflected on the surface of the semiconductor film is detected by four-array photodetectors, a CCD, or a PSD.

83. The method for manufacturing a semiconductor device according to claim 30,

wherein the autofocusing mechanism controls the distance between the semiconductor film and the lens by detecting the first laser beam reflected on the surface of the semiconductor film.

84. The method for manufacturing a semiconductor device according to claim 83,

wherein the second laser beam reflected on the surface of the semiconductor film is detected by four-array photodetectors, a CCD, or a PSD.

85. The method for manufacturing a semiconductor device according to claim 30,

wherein the beam spot is shaped into a linear, elliptical, or rectangular spot having a long side and a short side, and

wherein the beam spot is provided so that the long side of the beam spot is parallel to the first direction.

86. The method for manufacturing a semiconductor device according to claim 30,

wherein the distance between the semiconductor film and the lens is controlled by moving the semiconductor film or the lens in a third direction perpendicular to both of the first and second directions.

87. The method for manufacturing a semiconductor device according to claim 30,

wherein the semiconductor film is moved relative to the first laser beam more slowly in the first direction than in the second direction.

91. The method for manufacturing a semiconductor device according to claim 30,

wherein the first laser oscillator is a YAG laser, a YVO₄ laser, a GdVO₄ laser, a YLF laser, or an Ar laser.

92. The method for manufacturing a semiconductor device according to claim 30,

wherein the first laser oscillator is a pulsed laser having a pulse width of several tens ps or less.

93. The method for manufacturing a semiconductor device according to claim 30,

wherein the semiconductor film is provided over a glass substrate having a swell along one direction.