Measurement system and method and computer program for processing measurement data

• US 20050256669A1
• Filed: 04/29/2005
• Published: 11/17/2005
• Est. Priority Date: 04/30/2004
• Status: Active Grant

• Current Assignee: Toshiba Memory Corporation (Kioxia Corporation)
• Original Assignee: Kabushiki Kaisha Toshiba (Toshiba Corporation)
• Inventors: Mitsui, Tadashi
• Granted Patent: US 7,526,408 B2
• Time in Patent Office: Days
• US Class Current: 702/123
• CPC Class Codes: H01J 2237/2813 characterised by the application
• CPC Class Codes: H01J 37/222 Image processing arrangements associated with the tube

Abstract

A measurement system includes a measurement apparatus, a client computer, and a server computer. The server computer includes a setting edition unit configured to prepare/edit set contents of a recipe of the measurement apparatus from the client computer, a notification unit configured to notify the measurement apparatus of at least one execution request included in the recipe prepared/edited by the client computer, a data processing unit configured to process data acquired by the recipe whose execution request has been notified by the measurement apparatus based on setting information input from the client computer, and a result display unit configured to display a processing result of the data processing unit in the client computer.

Claims

1. A measurement system comprising:

at least one measurement apparatus connected to a computer network;

a client computer; and

a server computer, the server computer comprising;

a setting edition unit configured to prepare/edit set contents of a recipe of the measurement apparatus, by the client computer;

a notification unit configured to notify the measurement apparatus of at least one execution request included in the recipe prepared/edited by the client computer;

a data processing unit configured to process data acquired by the recipe whose execution request has been notified by the measurement apparatus based on setting information input from the client computer; and

a result display unit configured to display on the client computer a processing result of the data processing unit.

2. The measurement system according to claim 1, wherein

the notification unit of the server computer includes a code notification function to produce an inherent identification code with respect to the execution request of the recipe to notify the code to the measurement apparatus or the high-order host computer;

and

the result display unit includes a data display processing function to display data in the client computer referring to the identification code of the data output from the measurement apparatus, to which the inherent identification code has been added.

3. The measurement system according to claim 1, wherein

the setting edition unit of the server computer includes an update function to update the recipe prepared/edited based on setting information input from the client computer;

and

the notification unit includes a transfer function to transfer the updated recipe to the measurement apparatus or a client connected to the measurement apparatus.

4. The measurement system according to claim 1, wherein the setting edition unit of the server computer includes a changing function to convert a format of the recipe into a format corresponding to the measurement apparatus.

5. The measurement system according to claim 1, wherein the computer network is intranet or internet, the server computer is a worldwide web (WWW) server, an application server, or a database server, and a user receives a service of the system via a browser on the client computer.

6. The measurement system according to claim 1, wherein the client computer or a part of the client computer is a production management computer of a mass-production plant, and a request for execution of the recipe is output from the production management computer.

7. The measurement system according to claim 2, wherein the measurement apparatus is a CDSEM, the measurement data is an SEM image, and the data processing unit processes the data, and measures a pattern to obtain a numerical value.

8. A method for processing measurement data including image data and numerical data to be obtained after-measuring an object being finely processed and processing the measurement data by using a measurement system which includes at least one measurement apparatus connected to a computer network, a client computer, and a server computer, the server computer which includes at least a setting edition unit, a notification unit, a data processing unit, and a result display unit, the method comprising:

preparing/editing set contents of a recipe of the measurement apparatus from the client computer by the setting edition unit;

notifying the measurement apparatus of at least one execution request included in the recipe prepared/edited by the client computer by the notification unit;

processing data acquired by the recipe whose execution request has been notified by the measurement apparatus based on setting information input from the client computer by the data processing unit; and

displaying a processing result of the data processing unit in the client computer by the result display unit.

9. The method according to claim 8, further comprising:

notifying an inherent identification code after producing the code with respect to the execution request of the recipe to the measurement apparatus or the high-order host computer, by the notification unit; and

displaying data in the client computer referring to the identification code of the data output from the measurement apparatus, to which the inherent identification code has been added, by the result display unit.

10. The method according to claim 8, further comprising:

updating the recipe prepared/edited based on setting information input from the client computer by the setting edition unit; and

transferring the updated recipe to the measurement apparatus or a client computer connected to the measurement apparatus, by the notification unit.

11. The method according to claim 8, further comprising:

converting a format of the recipe into a format corresponding to the measurement apparatus, by the setting edition unit.

12. The method according to claim 8, wherein the computer network is intranet or internet, the server computer is a worldwide web (WWW) server, an application server, or a database server, and a user receives a service of the system via a browser on the client computer.

13. The method according to claim 8, wherein the client computer or a part of the client computer is a production management computer of a mass-production plant, and a request for execution of the recipe is output from the production management computer.

14. The method according to claim 8, wherein the measurement apparatus is a CDSEM, the measurement data is an SEM image, and the data processing unit processes the data, and measures a pattern to obtain a numerical value.

15. A computer program for processing measurement data including image data and numerical data to be obtained after measuring an object being finely processed and processing the measurement data by using a measurement system which includes at least one measurement apparatus connected to a computer network, a client computer, and a server computer, the server computer which includes at least a setting edition unit, a notification unit, a data processing unit, and a result display unit, the computer program comprising:

preparing/editing set contents of a recipe of the measurement apparatus from the client computer by the setting edition unit;

notifying the measurement apparatus of at least one execution request included in the recipe prepared/edited by the client computer by the notification unit;

processing data acquired by the recipe whose execution request has been notified by the measurement apparatus based on setting information input from the client computer by the data processing unit; and

displaying a processing result of the data processing unit in the client computer by the result display unit.

16. The computer program according to claim 15, further comprising:

notifying an inherent identification code after producing the code with respect to the execution request of the recipe to the measurement apparatus or the high-order host computer, by the notification unit; and

displaying data in the client computer referring to the identification code of the data output from the measurement apparatus, to which the inherent identification code has been added, by the result display unit.

17. The computer program according to claim 15, further comprising:

updating the recipe prepared/edited based on setting information input from the client computer by the setting edition unit; and

transferring the updated recipe to the measurement apparatus or a client computer connected to the measurement apparatus, by the notification unit.

18. The computer program according to claim 15, further comprising:

converting a format of the recipe into a format corresponding to the measurement apparatus, by the setting edition unit.

19. The computer program according to claim 15, wherein the computer network is intranet or internet, the server computer is a worldwide web (WWW) server, an application server, or a database server, and a user receives a service of the system via a browser on the client computer.

20. The computer program according to claim 15, wherein the measurement apparatus is a CDSEM, the measurement data is an SEM image, and the data processing unit processes the data, and measures a pattern to obtain a numerical value.