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Microfabricated miniature grids

  • US 20050258514A1
  • Filed: 05/06/2005
  • Published: 11/24/2005
  • Est. Priority Date: 05/07/2004
  • Status: Active Grant
First Claim
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1. An integrated microfabricated grid for controlling a charged particle stream, the grid formed of a plurality of electrically isolated conductive elements, comprising:

  • a substrate to serve as a support for said conductive elements at one of an end thereof, or at another support location within the grid;

    a hole in the substrate to allow the charged particle stream to pass therethrough; and

    the conductive elements lying in a common plane with one another, and formed from a microfabricated, integral layer disposed adjacent the substrate, the conductive elements having at least one dimension of 10 micrometers (um) or less.

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