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Micro-electro-mechanical system (MEMS) package with side sealing member and method of manufacturing the same

  • US 20050258516A1
  • Filed: 09/28/2004
  • Published: 11/24/2005
  • Est. Priority Date: 05/19/2004
  • Status: Active Grant
First Claim
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1. A micro-electro-mechanical system (MEMS) package with a side sealing member, comprising:

  • a base substrate provided with an MEMS element thereon;

    a first metal layer provided through patterning on the base substrate while surrounding the MEMS element; and

    a spacer mounted to the base substrate while being in contact with the first metal layer, thus securing an MEMS moving space where the MEMS element is free to move vertically;

    a lid glass provided with a second metal layer for uniting a sealing member to the lid glass, the second metal layer being provided at a predetermined portion at which the lid glass is in contact with the spacer when the lid glass is mounted to the spacer; and

    the sealing member provided on the first metal layer, the spacer and an outside surface of the second metal layer of the lid glass.

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