Method of imprinting shadow mask nanostructures for display pixel segregation

• US 20050258571A1
• Filed: 03/24/2005
• Published: 11/24/2005
• Est. Priority Date: 05/24/2004
• Status: Active Grant

• Current Assignee: Agency For Science Technology and Research
• Original Assignee: Agency For Science Technology and Research
• Inventors: Low, Hong Yee, Dumond, Jarrett
• Granted Patent: US 7,615,179 B2
• Time in Patent Office: Days
• US Class Current: 264/293
• CPC Class Codes: A61M 25/00 Catheters; Hollow probes dilators A61M29/00; peritoneal catheters A61M1/285; tracheal tubes A61M16/04; for drainage A61M27/00; for uterus, vagina or rectum A61M31/00 ; for measuring or testing A61B; materials for catheters A61L29/00
• CPC Class Codes: B27N 3/08 Moulding or pressing presses in general B30B
• CPC Class Codes: B28B 3/06 with two or more ram and mould sets
• CPC Class Codes: B81C 2201/034 Moulding
• CPC Class Codes: B81C 2203/032 Gluing
• CPC Class Codes: B81C 2203/038 Bonding techniques not provided for in B81C2203/031 - B81C2203/037
• CPC Class Codes: B81C 99/0085 using moulds and master templates, e.g. for hot-embossing
• CPC Class Codes: B82Y 10/00 Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
• CPC Class Codes: B82Y 40/00 Manufacture or treatment of nanostructures
• CPC Class Codes: G03F 7/0002 Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
• CPC Class Codes: Y10T 428/24479 including variation in thickness
• CPC Class Codes: Y10T 428/254 Polymeric or resinous material

Abstract

The present invention is directed to micro- and nano-scale imprinting methods and the use of such methods to fabricate supported and/or free-standing 3-D micro- and/or nano-structures of polymeric, ceramic, and/or metallic materials, particularly for pixel segregation in OLED-based displays. In some embodiments, a duo-mold approach is employed in the fabrication of these structures. In such methods, surface treatments are employed to impart differential surface energies to different molds and/or different parts of the mold(s). Such surface treatments permit the formation of three-dimensional (3-D) structures through imprinting and the transfer of such structures to a substrate. In some or other embodiments, such surface treatments and variation in glass transition temperature of the polymers used can facilitate separation of the 3-D structures from the molds to form free-standing micro- and/or nano-structures individually and/or in a film. In some or other embodiments, a “latch-on” assembly technique is utilized to form supported and/or free-standing stacked micro- and/or nano-structures that enable the assembly of polymers without a glass transition temperature and eliminate the heating required to assemble thermoplastic polymers.

Claims

1. A method of fabricating T-bar column structures comprising the steps of:

a) providing a first silicon mold comprising a silane-treated surface of low energy with lithographically-generated trenches;

b) spin-coating a polymer comprising a glass transition temperature T_g onto the silane-treated surface of the first silicon mold to form a polymer film which is structured on a first side in contact with the first silicon mold;

c) providing a second silicon mold comprising a silane-treated surface of medium energy with lithographically-generated trenches that are wider than the trenches of the first silicon mold;

d) pressing the silane-treated surface of the second silicon mold into the surface of the polymer film residing in the first silicon mold, at a temperature above T_g, to imprint the second side of the polymer film and yield a series of polymer T-bar structures within the molds;

e) separating the first silicon mold from the series of polymer T-bar structures at a temperature below T_g to yield a series of polymer T-bar structures attached to the second silicon mold;

f) pressing the series of polymer T-bar structures onto a substrate at a temperature below T_g and removing the second mold from the substrate after cooling to near room temperature to yield a series of polymer T-bar structures on the substrate, wherein the structures are connected to each other by a residue film; and

g) removing the residue film from the series of polymer T-bar structures to yield discrete polymer T-bar structures supported on the substrate.

2. The method of claim 1, wherein the T-bar structures are operable for facilitating pixel segregation in OLED-based display devices.

3. The method of claim 1, wherein the molds are treated with silanes selected from the group consisting of perfluorodecyltrichlorosilane (FDTS), octadecyltrichlorosilane (OTS), octadecylmethyldichlorosilane (ODS), phenethyltrichlorosilane (PETS), phenethylmethyltrichlorosilane (PEDS), and combinations thereof.

4. The method of claim 1, wherein the polymer is selected from the group consisting of a thermoplastic polymer selected from the group consisting of poly(methyl methacrylate) (PMMA), polycarbonate (PC), polyvinylacetate (PVAc), polystyrene (PS), and combinations thereof;

an elastomer selected from the group consisting of polydimethylsiloxane (PDMS), poly(isoprene), poly(butadiene), and combinations thereof; and

combinations thereof.

5. The method of claim 1, wherein the lithographically-generated trenches of the second mold are approximately twice as wide as the lithographically-generated trenches of the first mold.

6. The method of claim 1, wherein the substrate comprises a patterned layer of ITO.

7. The method of claim 1, wherein the substrate is flexible.

8. The method of claim 7, wherein the substrate is operable for use in flexible displays.

9. The method of claim 1, wherein removing the residue film comprises exposure to an O₂ plasma.

10. The method of claim 9, wherein the exposure to O₂ plasma further serves to roughen the top surface of the T-bar columns.

11. A method of fabricating shadow-mask structures on a substrate comprising the steps of:

a) providing a first mold comprising a surface of low energy with lithographically-generated trenches;

b) spin-coating a polymer comprising a glass transition temperature T_g onto the surface of the first mold to form a polymer film that is structured on a first side in contact with the first mold;

c) providing a second mold comprising a surface of medium energy with lithographically-generated trenches, wherein the trenches of the second mold are operable for forming shadow-mask structures when combined with the trenches of the first mold under conditions of proper alignment;

d) pressing the surface of the second mold into the surface of the polymer film residing in the first mold, at a temperature above T_g, to imprint the second side of the polymer film and provide a series of polymer shadow-mask structures within the molds;

e) separating the first mold from the series of polymer shadow-mask structures at a temperature below T_g to provide for a series of polymer shadow-mask structures attached to the second mold;

f) pressing the series of polymer shadow-mask structures onto a substrate at a temperature below T_g and removing the second mold from the substrate after cooling to near room temperature to yield a series of polymer shadow-mask structures on the substrate, wherein the structures are connected to each other by a residue film; and

g) removing the residue film from the series of polymer shadow-mask structures to yield discrete polymer shadow-mask structures supported on the substrate.

12. The method of claim 11, wherein the shadow-mask structures are operable for facilitating pixel segregation in OLED-based display devices.

13. The method of claim 11, wherein the first and second molds comprise material selected from the group consisting of metal, ceramic, glass, semiconductor, polymer, and combinations thereof.

14. The method of claim 11, wherein at least one of the first and second molds are surface treated to modify their native surface energy.

15. The method of claim 11, wherein the polymer is selected from the group consisting of a thermoplastic polymer selected from the group consisting of poly(methyl methacrylate) (PMMA), polycarbonate (PC), polyvinylacetate (PVAc), polystyrene (PS), and combinations thereof;

an elastomer selected from the group consisting of polydimethylsiloxane (PDMS), poly(isoprene), poly(butadiene), and combinations thereof; and

combinations thereof.

16. The method of claim 11, wherein the polymer is selected from the group consisting of a polymer blend, copolymers, and combinations thereof.

17. The method of claim 11, wherein the shadow-mask structures are selected from the group consisting of T-bar structures, reverse tapered polymeric structures, inverted pyramidal structures, high aspect ratio structures, and combinations thereof.

18. The method of claim 11, wherein the substrate comprises ITO.

19. The method of claim 11, wherein the substrate is flexible.

20. The method of claim 19, wherein the substrate is operable for use in flexible displays.

21. The method of claim 11, wherein the residue film is removed with an O₂ plasma.

22. A method of fabricating OLED-based display devices comprising the steps of:

a) providing a first mold comprising a surface of low energy with lithographically-generated trenches;

b) spin-coating a polymer comprising a glass transition temperature T_g onto the surface of the first mold to form a polymer film which is structured on a first side in contact with the first mold;

c) providing a second mold comprising a surface of medium energy with lithographically-generated trenches, wherein the trenches of the second mold are operable for forming shadow-mask structures when combined with the trenches of the first mold under conditions of proper alignment;

d) pressing the surface of the second mold into the surface of the polymer film residing in the first mold, at a temperature above T_g, to imprint the second side of the polymer film and provide a series of polymer shadow-mask structures within the molds;

e) separating the first mold from the series of polymer shadow-mask structures at a temperature below T_g to provide for a series of polymer shadow-mask structures attached to the second mold;

f) pressing the series of polymer shadow-mask structures onto a transparent substrate at a temperature below T_g and removing the second mold from the substrate after cooling to near room temperature to yield a series of polymer shadow-mask structures on the substrate, wherein the structures are connected to each other by a residue film; and

g) exposing the series of polymer shadow-mask structures to an O₂ plasma to remove the residue film and yield discrete polymer shadow-mask structures supported on the substrate.

23. The method of claim 22, wherein the substrate comprises a patterned anode layer.

24. The method of claim 23, wherein the anode layer comprises ITO.

25. The method of claim 22, wherein the substrate is flexible.

26. The method of claim 22, further comprising adding organic light-emitting molecules to the substrate in regions segregated by the shadow-mask structures.

27. The method of claim 26, wherein the organic light-emitting molecules are deposited onto the substrate by a technique selected from the group consisting of ink-jet printing, vapor deposition, and combinations thereof.

28. The method of claim 26, further comprising the vapor deposition of a cathode material on top of the regions comprising organic light-emitting molecules.