In-situ process chamber preparation methods for plasma ion implantation systems

• US 20050260354A1
• Filed: 05/20/2004
• Published: 11/24/2005
• Est. Priority Date: 05/20/2004
• Status: Abandoned Application

• Current Assignee: Varian Semiconductor Equipment Associates Incorporated (Applied Materials Incorporated)
• Original Assignee: Varian Semiconductor Equipment Associates Incorporated (Applied Materials Incorporated)
• Inventors: Singh, Vikram, Gupta, Atul, Walther, Steven R., Persing, Harold M., Testoni, Anne L.
• Application Number:
  US10/850,222
• Publication Number:
  US 20050260354A1
• Time in Patent Office: Days
• US Class Current: 427/523
• CPC Class Codes: H01J 37/32412 Plasma immersion ion implantation
• CPC Class Codes: H01J 37/32495 Means for protecting the vessel against plasma

Abstract

A method for plasma ion implantation of a substrate includes providing a plasma ion implantation system including a process chamber, a source for producing a plasma in the process chamber, a platen for holding the substrate in the process chamber, and a voltage source for accelerating ions from the plasma into the substrate, depositing on interior surfaces of the process chamber a fresh coating that is similar in composition to a deposited film that results from plasma ion implantation of the substrate, before depositing the fresh coating, cleaning interior surfaces of the process chamber by removing an old film using one or more activated cleaning precursors, plasma ion implantation of the substrate according to a plasma ion implantation process, and repeating the steps of cleaning interior surfaces of the process chamber and depositing a fresh coating following plasma ion implantation of one or more substrates.

Claims

1. A method for plasma ion implantation of a substrate, comprising:

providing a plasma ion implantation system including a process chamber, a source for producing a plasma in the process chamber, a platen for holding a substrate in the process chamber and a voltage source for accelerating ions from the plasma into the substrate;

depositing on interior surfaces of the process chamber a coating that is compatible with a plasma ion implantation process performed in the process chamber; and

plasma ion implantation of the substrate according to the plasma ion implantation process.

2. A method as defined in claim 1, wherein depositing a coating comprises depositing a coating containing a substrate material.

3. A method as defined in claim 1, wherein depositing a coating comprises depositing a silicon-containing material.

4. A method as defined in claim 1, wherein depositing a coating comprises depositing a coating containing a material selected from the group consisting of Si, Si—

Ge, Ge, GaAs, GaN, and sapphire.

5. A method as defined in claim 1, wherein depositing a coating includes introducing a coating precursor into the process chamber.

6. A method as defined in claim 5, wherein depositing a coating further comprises decomposing the coating precursor with the plasma.

7. A method as defined in claim 1, wherein depositing a coating further comprises monitoring a coating thickness during deposition.

8. A method as defined in claim 1, wherein depositing a coating comprises introducing into the process chamber a silicon-containing precursor selected from the group consisting of SiH₄, Si₂H₆, SiF₄, SiCl₄, trimethylsilane, and triethylsilane.

9. A method as defined in claim 8, wherein depositing a coating further comprises introducing an inert gas into the process chamber with the silicon-containing precursor.

10. A method as defined in claim 8, wherein depositing a coating further comprises introducing into the process chamber with the silicon-containing precursor a reactive gas selected from the group consisting of H₂, O₂, N₂, BF₃, B₂H₆, PH₃, AsF₅, PF₅, PF₃, or arsine.

11. A method as defined in claim 8, wherein depositing a coating further comprises introducing into the process chamber with the silicon-containing precursor a reactive gas selected to control a composition of the silicon-containing coating.

12. A method as defined in claim 1, wherein depositing a coating further comprises introducing into the process chamber a coating precursor and a reactive gas in predetermined proportions.

13. A method as defined in claim 1, wherein depositing a coating further comprises controlling one or both of pressure and gas flow in the process chamber during deposition.

14. A method as defined in claim 1, wherein depositing a coating comprises accelerating ions of a coating material to at least one interior surface of the process chamber using a DC pulse.

15. A method as defined in claim 1, wherein depositing a coating comprises injecting a coating precursor through holes in a hollow ring disposed around the platen.

16. A method as defined in claim 1, further comprising cleaning the process chamber before depositing a coating.

17. A method for plasma ion implantation of a substrate, comprising:

providing a plasma ion implantation system including a process chamber, a source for producing a plasma in the process chamber, a platen for holding a substrate in the process chamber and a voltage source for accelerating ions from the plasma into the substrate;

depositing on interior surfaces of the process chamber a dopant-containing coating that is compatible with a plasma ion implantation process performed in the process chamber; and

plasma ion implantation of the substrate according to the plasma ion implantation process.

18. A method as defined in claim 17, wherein the coating has a composition similar to a composition of the substrate surface during plasma ion implantation.

19. A method as defined in claim 17, wherein depositing a coating comprises depositing a coating containing a dopant selected from the group consisting of B, P, As, and Sb.

20. A method as defined in claim 17, wherein depositing a coating comprises introducing a boron-containing precursor gas and a silicon-containing precursor gas into the process chamber.

21. A method as defined in claim 17, wherein the coating comprises two or more layers.

22. A method as defined in claim 17, wherein depositing a coating comprises depositing a layer containing substrate material followed by depositing a dopant-containing layer.

23. A method as defined in claim 17, wherein depositing a dopant-containing coating comprises introducing a hydride dopant precursor into the process chamber.

24. A method as defined in claim 17, wherein depositing a dopant-containing coating comprises introducing a halide dopant precursor into the process chamber.

25. A method as defined in claim 17, wherein depositing a dopant-containing coating comprises introducing a dopant precursor and an inert gas into the process chamber.

26. A method as defined in claim 17, wherein depositing a dopant-containing coating comprises introducing a dopant precursor and a reactive gas into the process chamber.

27. A method as defined in claim 26, wherein introducing the dopant precursor and the reactive gas comprises flowing the dopant precursor and the reactive gas through a single nozzle into the process chamber.

28. A method as defined in claim 26, wherein introducing a dopant precursor and a reactive gas comprises flowing the dopant precursor and the reactive gas through different nozzles into the process chamber.

29. A method as defined in claim 26, wherein introducing a dopant precursor and a reactive gas comprises directing a flow of the dopant precursor and the reactive gas at a target area in the process chamber.

30. A method for plasma ion implantation of a substrate, comprising:

providing a plasma ion implantation system including a process chamber, a source for producing a plasma in the process chamber, a platen for holding a substrate in the process chamber, and a voltage source for accelerating ions from the plasma into the substrate;

cleaning interior surfaces of the process chamber with a cleaning gas that is compatible with a plasma ion implantation process performed in the process chamber; and

plasma ion implantation of the substrate according to the plasma ion implantation process.

31. A method as defined in claim 30, further comprising activating the cleaning gas with the plasma.

32. A method as defined in claim 30, further comprising thermally activating the cleaning gas.

33. A method as defined in claim 30, wherein the cleaning gas is selected from a group consisting of NF₃, NH₃, O₂, O₃, N₂O, Ar, He, H₂, CF₄, CHF₃, and combinations thereof.

34. A method as defined in claim 30, wherein the cleaning gas is selected for compatibility with the plasma ion implantation process.

35. A method as defined in claim 30, wherein cleaning interior surfaces of the process chamber is performed before depositing a fresh coating on interior surfaces of the process chamber.

36. A method as defined in claim 30, wherein a fluorine-based cleaning gas is used following plasma ion implantation with fluorinated dopants.

37. A method as defined in claim 30, wherein a hydrogen-based cleaning gas is used in applications where residual fluorine is undesirable.

38. A method as defined in claim 30, wherein a cleaning gas including a mixture of NF₃, O₂, and Ar is used after plasma ion implantation of boron using BF₃.

39. A method as defined in claim 30, wherein cleaning interior surfaces of the process chamber comprises controlling a pressure in the process chamber in a range of about 1 millitorr to 10 torr.

40. A method as defined in claim 30, wherein cleaning interior surfaces of the process chamber comprises controlling pressure in the process chamber in a range of about 100 millitorr to 2 torr.

41. A method as defined in claim 30, wherein cleaning interior surfaces of the process chamber comprises activating the cleaning gas with a plasma generated by RF energy in a range of about 100 watts to 5 kilowatts.

42. A method as defined in claim 30, wherein cleaning interior surfaces of the process chamber comprises activating the cleaning gas with a plasma generated by DC pulses.

43. A method as defined in claim 30, wherein cleaning interior surfaces of the process chamber comprises heating one or more surfaces of the process chamber.

44. A method as defined in claim 30, wherein cleaning interior surfaces of the process chamber comprises activating the cleaning gas with a plasma generated by a combination of RF energy and DC pulses.

45. A method as defined in claim 30, wherein cleaning interior surfaces of the process chamber comprises providing electric fields in the process chamber for acceleration of ions of the cleaning gas.

46. A method as defined in claim 30, wherein cleaning interior surfaces of the process chamber further includes degassing the process chamber with an inert gas.

47. A method as defined in claim 30, wherein cleaning interior surfaces of the process chamber further includes degassing the process chamber with a passivating gas.

48. A method for plasma ion implantation of a substrate, comprising:

providing a plasma ion implantation system including a process chamber, a source for producing a plasma in the process chamber, a platen for holding a substrate in the process chamber, and a voltage source for accelerating ions from the plasma into the substrate;

depositing on interior surfaces of the process chamber a fresh coating that is similar in composition to a deposited film that results from plasma ion implantation of the substrate;

before depositing the fresh coating, cleaning interior surfaces of the process chamber by removing an old film using one or more activated cleaning precursors;

plasma ion implantation of the substrate according to a plasma ion implantation process; and

repeating the steps of cleaning interior surfaces of the process chamber and depositing a fresh coating following plasma ion implantation of one or more substrates.

49. A plasma ion implantation system comprising:

a process chamber;

a source for producing a plasma in the process chamber;

a platen for holding a substrate in the process chamber;

a pulse source for generating implant pulses for accelerating ions from the plasma into the substrate; and

means for depositing on interior surfaces of the process chamber a coating that is compatible with a plasma ion implantation process performed in the process chamber.

50. A plasma ion implantation system comprising:

a process chamber;

a source for producing a plasma in the process chamber;

a platen for holding a substrate in the process chamber;

a pulse source for generating implant pulses for accelerating ions from the plasma into the substrate; and

means for depositing on interior surfaces of the process chamber a dopant-containing coating that is compatible with a plasma ion implantation process performed in the process chamber.

51. A plasma ion implantation system comprising:

a process chamber;

a source for producing a plasma in the process chamber;

a platen for holding a substrate in the process chamber;

a pulse source for generating implant pulses for accelerating ions from the plasma into the substrate; and

means for cleaning interior surfaces of the process chamber with a cleaning gas that is compatible with a plasma ion implantation process performed in the process chamber.

52. A plasma ion implantation system comprising:

a process chamber;

a source for producing a plasma in the process chamber;

a platen for holding a substrate in the process chamber;

a pulse source for generating implant pulses for accelerating ions from the plasma into the substrate;

means for depositing on an interior surface of the process chamber a fresh coating that is similar in composition to a deposited film that results from plasma ion implantation of the substrate; and

means for cleaning interior surfaces of the process chamber, before depositing the fresh coating, by removing an old film using one or more activated cleaning precursors.