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Apparatus and method for anchoring micromachined structures

  • US 20050262942A1
  • Filed: 05/16/2005
  • Published: 12/01/2005
  • Est. Priority Date: 07/19/2002
  • Status: Active Grant
First Claim
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1. A micromachined apparatus comprising:

  • a substrate; and

    at least one micromachined structure anchored to the substrate, wherein the at least one micromachined structure is subject to bending or twisting about the anchor point, and wherein the at least one micromachined structure is anchored to the substrate using one of an elongated anchor and multiple anchors in order to reduce the bending or twisting of the at least one micromachined structure about the anchor point.

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