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Apparatus, methods, and systems to detect an analyte based on changes in a resonant frequency of a spring element

  • US 20050262943A1
  • Filed: 05/27/2004
  • Published: 12/01/2005
  • Est. Priority Date: 05/27/2004
  • Status: Abandoned Application
First Claim
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1. A microelectromechanical system sensor, comprising:

  • a spring element;

    a sensing material on the spring element; and

    a detector adapted to determine a resonant frequency associated with the spring element, wherein the resonant frequency changes upon the exposure of the sensing material to an analyte.

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