Pressure sensor and method for operating a pressure sensor
First Claim
1. A pressure sensor comprising:
- a substrate;
a counter-structure applied to the substrate;
a dielectric on the counter-structure;
a membrane on the dielectric, wherein the membrane or the counter-structure is deflectable by a pressure applied;
a protective structure, the protective structure being isolated from the counter-structure and the membrane, the protective structure being arranged with regard to the membrane or the counter-structure such that a capacity forms between the protective structure and the membrane or the protective structure and the counter-structure; and
a provider for providing a potential at the protective structure differing from a potential at the counter-structure or the membrane.
1 Assignment
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Accused Products
Abstract
A pressure sensor having a substrate, a counter-structure applied to the substrate, a dielectric on the counter-structure, a membrane on the dielectric, wherein the membrane or the counter-structure deflectable by a pressure applied, a protective structure, wherein the protective structure is isolated from the counter-structure or the membrane, wherein the protective structure is arranged with regard to the membrane or the counter-structure such that a capacity forms between the protective structure and the membrane or the protective structure and the counter-structure, and a provider for providing a potential at the protective structure differing from a potential at the counter-structure or the membrane.
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Citations
20 Claims
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1. A pressure sensor comprising:
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a substrate;
a counter-structure applied to the substrate;
a dielectric on the counter-structure;
a membrane on the dielectric, wherein the membrane or the counter-structure is deflectable by a pressure applied;
a protective structure, the protective structure being isolated from the counter-structure and the membrane, the protective structure being arranged with regard to the membrane or the counter-structure such that a capacity forms between the protective structure and the membrane or the protective structure and the counter-structure; and
a provider for providing a potential at the protective structure differing from a potential at the counter-structure or the membrane. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19)
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20. A method for operating a pressure sensor, comprising:
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a substrate;
a counter-structure applied to the substrate;
a dielectric on the counter-structure;
a membrane on the dielectric, the membrane or the counter-structure being deflectable by a pressure applied; and
a protective structure arranged with regard to the membrane such that a capacity forms between the protective structure and the member or the protective structure and the counter-structure;
comprising a step of applying a potential to the protective structure differing from a potential of the counter-structure or the membrane.
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Specification