Substrate holding apparatus
First Claim
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1. A substrate holding apparatus comprise of clamp holder with multiple force points, clamp tool and support block.
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Abstract
A substrate holding apparatus for semiconductor processing like wire bonding process is disclosed. Two or more holding points at both side of center locating point are provided to created a distributed holding force at clamp tool holding shoulder to generate a moment about substrate moving direction to act on clamp tool so that clamp tool can clamp on substrate more evenly at all sides for better process quality.
15 Citations
4 Claims
- 1. A substrate holding apparatus comprise of clamp holder with multiple force points, clamp tool and support block.
Specification