Photonic crystal-based filter for use in an image sensor
First Claim
Patent Images
1. An image sensor comprising:
- an array of pixel cells at a surface of a substrate, each pixel cell comprising a photo-conversion device; and
at least one photonic crystal filter over at least one of the pixel cells and configured to selectively permit electromagnetic wavelengths to reach the photo-conversion device.
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Accused Products
Abstract
The invention, in various exemplary embodiments, incorporates a photonic crystal filter into an image sensor. The photonic crystal filter comprises a substrate and a plurality of pillars forming a photonic crystal structure over the substrate. The pillars are spaced apart from each other. Each pillar has a height and a horizontal cross sectional shape. A material with a different dielectric constant than the pillars is provided within the spacing between the pillars. The photonic crystal filter is configured to selectively permit particular wavelengths of electromagnetic radiation to pass through.
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Citations
58 Claims
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1. An image sensor comprising:
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an array of pixel cells at a surface of a substrate, each pixel cell comprising a photo-conversion device; and
at least one photonic crystal filter over at least one of the pixel cells and configured to selectively permit electromagnetic wavelengths to reach the photo-conversion device. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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14. An image sensor comprising:
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an array of pixel cells at a surface of a substrate, each pixel cell comprising a photo-conversion device; and
at least one filter over at least one of the pixel cells, the at least one filter having a photonic crystal structure. - View Dependent Claims (15, 16)
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17. A processor system comprising:
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(i) a processor; and
(ii) an image sensor coupled to the processor, the image sensor comprising;
a substrate, an array of pixel cells at a surface of the substrate, each pixel cell comprising a photo-conversion device, and at least one photonic crystal filter over at least one of the pixel cells configured to selectively permit electromagnetic wavelengths to reach at least one photo-conversion device. - View Dependent Claims (18, 19)
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20. A photonic crystal filter for an image sensor, the filter comprising:
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a substrate;
a plurality of pillars forming a photonic crystal structure over the substrate, the pillars being spaced apart from each other; and
a material within the spacing between the pillars having a dielectric constant that is different than a dielectric constant of the pillars, the photonic crystal structure configured to be selective for particular wavelengths of electromagnetic radiation. - View Dependent Claims (21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33)
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34. A method of forming an image sensor, the method comprising:
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forming an array of pixel cells at a surface of a substrate, each pixel cell formed comprising a photo-conversion device; and
forming at least one photonic crystal filter over at least one of the pixel cells, the photonic crystal filter configured to selectively permit electromagnetic wavelengths to reach at least one photo-conversion device. - View Dependent Claims (35, 36, 37, 38, 39, 40, 41, 42, 43, 44)
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45. A method of forming an image sensor, the method comprising:
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forming an array of pixel cells at a surface of a substrate, each pixel cell formed comprising a photo-conversion device;
forming a dielectric layer over the pixel cells; and
forming at least one photonic crystal filter on the dielectric layer by;
forming a layer of photonic crystal material on the dielectric layer, etching the photonic crystal material layer to form a plurality of pillars spaced apart from each other, each pillar formed having a height and a horizontal cross sectional shape, depositing over and between the pillars a layer of a material having a dielectric constant different than a dielectric constant of the pillars, the pillar height, the pillar shape, and the material layer formed such that the filter selectively permits electromagnetic wavelengths to reach at least one photo-conversion device, and planarizing the material layer and the pillars.
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46. A method of forming a photonic crystal filter for an image sensor, the method comprising:
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providing a substrate;
forming a layer of a photonic crystal material over the substrate;
patterning the photonic crystal material layer to form a plurality of pillars forming a photonic crystal structure, the photonic crystal structure formed to be selective for particular wavelengths of electromagnetic radiation, the pillars formed spaced apart from each other and each having a height and a horizontal cross sectional shape; and
placing a material having a lower dielectric constant than a dielectric constant of the pillars within the spacing between the pillars. - View Dependent Claims (47, 48, 49, 50, 51, 52, 53, 54, 55, 56, 57, 58)
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Specification