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Apparatus for evaluating amount of charge, method for fabricating the same, and method for evaluating amount of charge

  • US 20050263833A1
  • Filed: 08/03/2005
  • Published: 12/01/2005
  • Est. Priority Date: 12/06/2002
  • Status: Abandoned Application
First Claim
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1. An apparatus for evaluating an amount of charge, the apparatus comprising:

  • a substrate having a substantially intrinsic undoped silicon layer;

    p-type regions dotted as discrete islands in the undoped silicon layer; and

    a first insulating layer provided over the undoped silicon layer and the p-type regions.

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