Rotary-type comb-drive actuator and variable optical attenuator using the same
First Claim
1. A rotary-type comb-drive actuator, comprising:
- a substrate;
a movable electrode arranged on a plane of the substrate to be movable in parallel to the substrate plane, and formed to have a predetermined length so as to have a comb-shaped electrode comprised of a plurality of fingers;
a drive electrode formed to have a length corresponding to that of the movable electrode so as to apply an electrostatic force to the movable electrode, and formed to have a comb-shaped electrode that is comprised of a plurality of fingers and arranged to be interdigitated with the comb-shaped electrode of the movable electrode, the drive electrode being fixed on the substrate;
one or more vertical springs arranged in parallel to the substrate, and connected to be perpendicular to the movable electrode on both sides of a first end of the movable electrode;
one or more vertical spring anchors connected to the vertical springs to support the vertical springs, and fixed on the substrate;
a horizontal spring having a main part connected in parallel to a longitudinal direction of the movable electrode, the horizontal spring being connected to a side of the movable electrode; and
a horizontal spring anchor connected to the horizontal spring to support the horizontal spring, and fixed on the substrate.
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Accused Products
Abstract
The present invention relates to an actuator and optical attenuator using the actuator. The rotary-type comb-drive actuator includes a substrate, a movable electrode, a drive electrode, one or more vertical springs, one or more vertical spring anchors, a horizontal spring and a horizontal spring anchor. The movable electrode is arranged on a plane of the substrate to be movable in parallel to the substrate plane, and formed to have a predetermined length so as to have a comb-shaped electrode comprised of a plurality of fingers. The drive electrode is formed to have a length corresponding to that of the movable electrode, and formed to have a comb-shaped electrode that is comprised of a plurality of fingers and arranged to be interdigitated with the comb-shaped electrode of the movable electrode. The vertical springs are arranged in parallel to the substrate, and connected to be perpendicular to the movable electrode on both sides of a first end of the movable electrode. The vertical spring anchors are connected to the vertical springs to support the vertical springs. The horizontal spring has a main part connected in parallel to a longitudinal direction of the movable electrode. The horizontal spring anchor is connected to the horizontal spring to support the horizontal spring, and fixed on the substrate.
29 Citations
9 Claims
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1. A rotary-type comb-drive actuator, comprising:
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a substrate;
a movable electrode arranged on a plane of the substrate to be movable in parallel to the substrate plane, and formed to have a predetermined length so as to have a comb-shaped electrode comprised of a plurality of fingers;
a drive electrode formed to have a length corresponding to that of the movable electrode so as to apply an electrostatic force to the movable electrode, and formed to have a comb-shaped electrode that is comprised of a plurality of fingers and arranged to be interdigitated with the comb-shaped electrode of the movable electrode, the drive electrode being fixed on the substrate;
one or more vertical springs arranged in parallel to the substrate, and connected to be perpendicular to the movable electrode on both sides of a first end of the movable electrode;
one or more vertical spring anchors connected to the vertical springs to support the vertical springs, and fixed on the substrate;
a horizontal spring having a main part connected in parallel to a longitudinal direction of the movable electrode, the horizontal spring being connected to a side of the movable electrode; and
a horizontal spring anchor connected to the horizontal spring to support the horizontal spring, and fixed on the substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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Specification