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Multiple electron beam systems

  • US 20050264148A1
  • Filed: 05/28/2004
  • Published: 12/01/2005
  • Est. Priority Date: 05/28/2004
  • Status: Active Grant
First Claim
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1. A multiple electron beam source comprising:

  • (a) a photocathode comprising a photon receiving surface to receive a photon beam and an electron emitting surface to emit electrons; and

    (b) an array of electron transmission gates spaced apart from the electron emitting surface of the photocathode by a distance dg, each electron transmission gate comprising;

    (i) a membrane having opposing first and second surfaces;

    (ii) an anode on the first surface of the membrane;

    (iii) an insulator on the second surface of the membrane;

    (iv) an aperture through the anode, insulator and membrane; and

    (v) a gate electrode on the insulator, the gate electrode positioned about the aperture, the gate electrode capable of receiving a gate control voltage that controls the transmission of electrons emitted from the photocathode through that electron transmission gate.

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