Apparatus for detecting defect in circuit pattern and defect detecting system having the same

• US 20050264306A1
• Filed: 06/01/2004
• Published: 12/01/2005
• Est. Priority Date: 06/01/2004
• Status: Active Grant

• Current Assignee: MDS Incorporated (Molecular Devices)
• Original Assignee: Samsung Techwin Corporation (Hanwha Vision Company Limited)
• Inventors: Kim, Bruce, Han, Seong-Young, Jung, Boo-Yang
• Granted Patent: US 7,129,719 B2
• Time in Patent Office: Days
• US Class Current: 324/717
• CPC Class Codes: G01R 31/2853 Electrical testing of internal connections or -isolation, e.g. latch-up or chip-to-lead connections G01R31/31717 takes precedence; test of chip-to-PCB or lead-to-PCB connections G01R31/66
• CPC Class Codes: G01R 31/2896 Testing of IC packages; Test features related to IC packages containers per se H01L23/02, encapsulations per se H01L23/28

Abstract

Provided is an apparatus for detecting a defect of a circuit pattern which includes a resonator, a first power supply unit connected to one end of the resonator to apply power to the resonator, a probe connected to the other end of the resonator to contact one end of the circuit pattern, a second power supply unit connected to the other end of the circuit pattern to apply a voltage thereto, and a detection portion connected between the resonator and the probe to measure a voltage generated from the circuit pattern and generate a measurement voltage, and determine presence of a defect in the circuit pattern from the measurement voltage.

Claims

1. An apparatus to test an electronic device, the apparatus comprising:

a circuit to apply an electrical parameter to a first section of the electronic device;

an element coupled to a second section of the electronic device to change a value of the applied electrical parameter; and

a detection portion in communication with the circuit to measure the changed value of the applied electrical parameter and to compare the measured changed value of the applied electrical parameter to a benchmark to determine a status of the electronic device.

2. The apparatus of claim 1, wherein the electrical parameter is a voltage.

3. The apparatus of claim 1, wherein the electrical parameter is a current.

4. The apparatus of claim 1, wherein the element is a power supply.

5. The apparatus of claim 1, wherein the element is a ground.

6. The apparatus of claim 1, wherein the element forms a magnetic field and supplies power to the second section of the electronic device.

7. The apparatus of claim 1, wherein the circuit includes a resonator that comprises a resistor, a capacitor, and an inductor which are connected in parallel.

8. The apparatus of claim 7, wherein the detection portion comprises:

a probe in communication with the circuit;

a measurement portion connected to the resonator and the probe to measure the value of the electrical parameter; and

a determination portion to determine presence of a defect of the electronic device from the value of the electrical parameter.

9. The apparatus of claim 8, wherein the benchmark is an electrical parameter measured when no defect is present in the electronic device.

10. The apparatus of claim 8, wherein the determination portion determines a defect type according to a pattern produced by the value of the measured changed electrical parameter.

11. The apparatus of claim 10, wherein, the defect types comprise an open defect, a mouse bite, a pseudo short, and a short.

12. The apparatus of claim 1, wherein the detection portion comprises:

a filter which filters an alternating current analog signal modulated by the electronic device and generates a filtering signal;

a rectifier which receives the filtering signal and generates a direct current analog signal;

an analog-to-digital converter which generates a digital measurement signal from the direct current analog signal;

a memory which stores a reference signal that is measurement signal data, according to a defect type of the electronic device; and

a determination portion which determines presence and type of a defect of the electronic device by comparing the measurement signal with the reference signal.

13. The apparatus of claim 8, wherein the detection portion comprises:

a filter which filters an alternating current analog signal modulated by the electronic device and generates a filtering signal;

a rectifier which receives the filtering signal and generates a direct current analog signal;

an analog-to-digital converter which generates a digital measurement signal from the direct current analog signal;

a memory which stores a reference signal that is measurement signal data, according to a defect type of the electronic device; and

a determination portion which determines presence and type of a defect of the electronic device by comparing the measurement signal with the reference signal.

14. The apparatus of claim 12, wherein the reference signal is based on a value obtained by a computer simulation of position and defect type according to the electronic device.

15. An apparatus to test an electronic device, the apparatus comprising:

a circuit to apply an electrical parameter to a first section of the electronic device;

an element coupled to a second section of the electronic device to change a value of the applied electrical parameter; and

a detection portion in communication with the circuit to measure an input end reflection coefficient that is a ratio of a reflection wave power with respect to an incident wave power of the electronic device and to compare the measured input end reflection coefficient to a benchmark to determine a status of the electronic device.

16. The apparatus of claim 15, wherein the element is a power supply.

17. The apparatus of claim 15,,wherein the element is a ground.

18. The apparatus of claim. 15, wherein the circuit further comprises a probe and a resonator.

19. The apparatus of claim 18, wherein the detection portion comprises:

an input end reflection coefficient measurement portion which is connected between the resonator and the probe to measure the input end reflection coefficient; and

a determination portion which determines present and type of a defect of the electronic device from the input end reflection coefficient.

20. The apparatus of claim 18, wherein the determination portion determines presence and type of a defect of the electronic device by comparing the input end reflection coefficient with an input end reflection coefficient measured when no defect is present in the electronic device.

21. An apparatus to test an electronic device, the apparatus comprising:

a circuit to apply an electrical parameter to a first section of the electronic device and to sense a value of the applied electrical parameter;

an amplification portion coupled to the circuit to amplify the sensed value of the applied electrical parameter; and

a detection portion in communication with the amplification portion to measure the amplified value of the applied electrical parameter and to compare the amplified value of the applied electrical parameter to a benchmark to determine a status of the electronic device.

22. The apparatus of claim 21, wherein the amplification portion is a low noise amplifier.

23. The apparatus of claim 21, further comprising an element coupled to a second section of the electronic device to change a value of the electrical parameter between the first section of the electronic device and the second section of the electronic device.

24. The apparatus of claim 23, wherein the element is a ground.

25. The apparatus of claim 23, wherein the element is a power supply.

26. The apparatus of claim 23, wherein the electrical parameter is a voltage.

27. The apparatus of claim 23, wherein the electrical parameter is a current.

28. The apparatus of claim 23, wherein the circuit further comprises a probe and a resonator.

29. The apparatus of claim 28, wherein the detection portion comprises:

a measurement portion connected between the resonator and the probe to measure the value of the applied electrical parameter; and

a determination portion to determine presence and type of a defect of the electronic device from the value of the applied electrical parameter.

31. The apparatus of claim 21, wherein the detection portion comprises:

a filter which filters an alternating current analog signal modulated by the electronic devices and generates a filtering signal;

a rectifier which receives the filtering signal and generates a direct current analog signal;

an analog-to-digital converter which generates a digital measurement signal from the direct current analog signal;

a memory which stores a reference signal that is measurement signal data, according to a type of a defect of the electronic device; and

a determination portion which determines presence and type of a defect of the electronic devices by comparing the measurement signal with the reference signal.

32. The apparatus of claim 31, wherein the reference signal is set by a pattern of a difference between the measurement voltage according to a type of a defect of the electronic devices and a voltage measured when no defect is present in the electronic devices.

33. The apparatus of claim 31, wherein the reference signal is based on a value obtained by a computer simulation of position and type of a defect according to the electronic devices.

34. The apparatus of claim 31, wherein the determination portion generates a digital switching control signal according to completion of determination of presence and type of a defect of the electronic devices, and the switching control portion comprises:

a digital-to-analog converter which generates an analog switching control signal from the digital switching control signal; and

a demultiplexer which controls switching of the first and second switches by the analog switching control signal.

35. The apparatus of claim 31, wherein the filter is a band pass filter which filters a signal based on a first cut-off frequency and a second cut-off frequency higher than the first cut-off frequency.

30. An apparatus to test a plurality of electronic devices, the apparatus comprising:

a resonator;

a first power supply unit connected to one end of the resonator to apply power to the resonator;

a probe having a plurality of probe portions which are connected to the other end of the resonator and contact one end of each of the electronic devices;

one or more first switches connected between the resonator and the probe to switch connection between the resonator and each of the probe portions of the probe;

a second power supply unit connected to the other end of each of the electronic devices to apply power thereto;

one or more second switches connected between the other end of each of the electronic devices and the second power supply unit to switch connection between each electronic device and the second power supply unit;

a detection portion connected between the resonator and each of the first switches to measure a voltage generated from one of the electronic devices and generate a measurement voltage, and determine presence and type of a defect in the electronic devices from the measurement voltage; and

a switching control portion receiving a switch control signal from the detection portion and controlling switching of the first and second switches.

36. The apparatus of claim 30, wherein the detection portion measures an input end reflection coefficient that is a ratio between power of a reflection wave returning from the electronic devices and power of an incident wave input to the electronic devices through the probe.

37. The apparatus of claim 36, wherein the reference signal is set by a pattern of the input end reflection coefficient according to type of a defect of the circuit patter.

38. The apparatus of claim 30, wherein the first switches are transistor switches capable of inputting signals from the single resonator to a plurality of the electronic devices by dispersing the signals.