×

Substrate handling system for aligning and orienting substrates during a transfer operation

  • US 20050265814A1
  • Filed: 01/28/2005
  • Published: 12/01/2005
  • Est. Priority Date: 09/10/2003
  • Status: Active Grant
First Claim
Patent Images

1. A substrate transport apparatus comprising:

  • a movable transport arm; and

    an end effector movably connected to the transport arm, the end effector having a chuck adapted for holding a substrate, and a motor for moving the substrate held by the chuck, wherein the motor is disposed relative to the chuck so that, when the substrate is held by the chuck, a center of the substrate is substantially co-incident with an axis of movement of the motor.

View all claims
  • 7 Assignments
Timeline View
Assignment View
    ×
    ×