Holder for wafers
First Claim
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1. A holder for a wafer, the holder comprising at least one of:
- At least one holes or guide-way to allow for electrical contacting between read-out and control electronics and the wafer, A first alignment system to precisely align the wafer in the holder, At least one release opening for taking the wafer out of the holder, At least one gas inlet to control ambient gas composition and/or humidity in the neighbourhood of the wafer, At least one thermally insulating cavity, At least one insulating layer for thermal insulation, thermal heat sinking, electrical shielding, gas tightness and/or liquid tightness, At least one hole for dispensing liquids onto the wafer, At least one opening/closing means to open or close the at least one hole, A second alignment system to precisely position the holder in a reader, and A guiding system to position the wafer in the holder.
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Abstract
The present invention provides a holder (20) for wafers (14) which makes it possible to more easily manipulate the wafer (14) and makes it more suitable than prior art devices for to liquid handling, wafer handling and on-wafer manipulation of substances, while it also makes it possible to align the wafer (14) accurately and furthermore allows to create a well controlled ambient in the neighbourhood of the wafer (14).
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Citations
19 Claims
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1. A holder for a wafer, the holder comprising at least one of:
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At least one holes or guide-way to allow for electrical contacting between read-out and control electronics and the wafer, A first alignment system to precisely align the wafer in the holder, At least one release opening for taking the wafer out of the holder, At least one gas inlet to control ambient gas composition and/or humidity in the neighbourhood of the wafer, At least one thermally insulating cavity, At least one insulating layer for thermal insulation, thermal heat sinking, electrical shielding, gas tightness and/or liquid tightness, At least one hole for dispensing liquids onto the wafer, At least one opening/closing means to open or close the at least one hole, A second alignment system to precisely position the holder in a reader, and A guiding system to position the wafer in the holder. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19)
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Specification