Retaining rings, planarizing apparatuses including retaining rings, and methods for planarizing micro-device workpieces

• US 20050266783A1
• Filed: 08/01/2005
• Published: 12/01/2005
• Est. Priority Date: 07/08/2002
• Status: Active Grant

• Current Assignee: Micron Technology, Inc.
• Original Assignee: Micron Technology, Inc.
• Inventors: Taylor, Theodore M.
• Granted Patent: US 7,189,153 B2
• Time in Patent Office: Days
• US Class Current: 451/388
• CPC Class Codes: B24B 37/32 Retaining rings

Abstract

Retaining rings, planarizing apparatuses including retaining rings, and methods for mechanical and/or chemical-mechanical planarization of micro-device workpieces are disclosed herein. In one embodiment, a carrier head for retaining a micro-device workpiece during mechanical or chemical-mechanical polishing includes a workpiece holder configured to receive the workpiece and a retaining ring carried by the workpiece holder. The retaining ring includes an inner surface, an outer surface, a first surface between the inner surface and the outer surface, and a plurality of grooves in the first surface extending from the inner surface to the outer surface. The grooves include at least a first groove and a second groove positioned adjacent and at least substantially transverse to the first groove.

Claims

1. A carrier head for retaining a micro-device workpiece during mechanical or chemical-mechanical polishing, the carrier head comprising:

a workpiece holder configured to receive the workpiece; and

a retaining ring carried by the workpiece holder, the retaining ring including an inner surface, an outer surface, a first surface between the inner surface and the outer surface, and a plurality of grooves in the first surface extending from the inner surface to the outer surface, wherein the grooves include at least a first groove and a second groove positioned adjacent and at least substantially transverse to the first groove.

2. The carrier head of claim 1 wherein the first groove intersects the second groove.

3. The carrier head of claim 1 wherein the first groove intersects the second groove proximate to the inner surface.

4. The carrier head of claim 1 wherein the first groove intersects the second groove proximate to a midpoint between the inner surface and the outer surface.

5. The carrier head of claim 1 wherein the first groove intersects the second groove proximate to the outer surface.

6. The carrier head of claim 1 wherein the first groove is positioned at an angle of between 90 and 130 degrees relative to the second groove.

7. The carrier head of claim 1, further comprising a plurality of first grooves and a plurality of second grooves arranged in groove pairs, wherein each groove pair has a first groove and a second groove that are at least substantially transverse to each other.

8. The carrier head of claim 1 wherein at least one of the first and second grooves is straight.

9. The carrier head of claim 1 wherein at least one of the first and second grooves is curved.

10. The carrier head of claim 1 wherein the first groove intersects the second groove creating an “

X”

pattern.

11. The carrier head of claim 1 wherein the first groove intersects the second groove creating a “

V”

pattern.

12. A carrier head for retaining a micro-device workpiece during rotation in a solution, the carrier head comprising:

a workpiece holder configured to receive the workpiece; and

a retaining ring carried by the workpiece holder, the retaining ring including an inner wall, an outer wall, and a first surface between the inner wall and the outer wall, the first surface having a first plurality of channels and a second plurality of channels, the first and second plurality of channels extending from the inner wall to the outer wall, the first plurality of channels being configured to pump the solution into the retaining ring when the retaining ring is rotated in a first direction, the second plurality of channels being configured to exhaust the solution from the retaining ring when the retaining ring is rotated in the first direction.

13. The carrier head of claim 12 wherein each channel in the first plurality of channels intersects a corresponding channel in the second plurality of channels.

14. The carrier head of claim 12 wherein each channel in the first plurality of channels intersects a corresponding channel in the second plurality of channels proximate to the inner wall.

15. The carrier head of claim 12 wherein each channel in the first plurality of channels intersects a corresponding channel in the second plurality of channels proximate to a midpoint between the inner wall and the outer wall.

16. The carrier head of claim 12 wherein each channel in the first plurality of channels intersects a corresponding channel in the second plurality of channels proximate to the outer wall.

17. The carrier head of claim 12 wherein each channel in the first plurality of channels is positioned at an angle of between 90 and 130 degrees relative to a corresponding channel in the second plurality of channels.

18. The carrier head of claim 12 wherein at least one of the channels in the first plurality of channels is straight.

19. The carrier head of claim 12 wherein at least one of the channels in the first plurality of channels is curved.

20. The carrier head of claim 12 wherein each channel in the first plurality of channels intersects a corresponding channel in the second plurality of channels creating an “

X”

pattern.

21-60. -60. (canceled)