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Process module tuning

  • US 20050267606A1
  • Filed: 05/25/2004
  • Published: 12/01/2005
  • Est. Priority Date: 05/25/2004
  • Status: Active Grant
First Claim
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1. A method of characterizing a process module having a plurality of process inputs that affect a process condition, using a process condition measuring device having a plurality of sensors that measure the process condition, comprising:

  • placing the process condition measuring device in the process module;

    providing a first excitation to at least a first process input and providing a second excitation to at least a second process input, while recording the output of the plurality of sensors; and

    using the recorded output of the plurality of sensors to develop a model of relationships between the process condition and the plurality of process inputs, including a first relationship between the process condition at a first sensor and the first process input and a second relationship between the process condition at the first sensor and the second process input.

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