Electrochemical sensor compensated for relative humidity
First Claim
1. An electrochemical gas sensor comprising:
- a substrate having a surface;
a counter and reference electrode being deposited on said surface;
a first sensing electrode and a second sensing electrode, being spaced apart from one another and from said counter and reference electrode, being deposited on said surface;
a first electrolytic material having a first thickness and being in contact with said first sensing electrode for carrying a flow of ions;
a second electrolytic material having a second thickness and being in contact with said second sensing electrode for carrying a flow of ions; and
said second thickness being greater than said first thickness.
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Abstract
The invention relates to an electrochemical gas sensor having both a reference sensor and an active sensor, whereby each reference and active sensor includes a substrate, a counter electrode deposited on a surface of the substrate, a sensing electrode also deposited on the surface, and a solid electrolytic material in electrical contact with both electrodes for carrying a flow of ions between them, which measures a concentration of a gas and compensates for relative humidity differences between sample gas and surrounding atmosphere. The sensor also includes a layer of solid electrolytic material on the sensing electrode of the reference sensor and a film of solid electrolytic material on the sensing electrode of the active sensor, whereby the layer is thicker than the film. The invention may further include a reference electrode in both the reference and active sensors for improving sensor accuracy and/or repeatability.
12 Citations
12 Claims
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1. An electrochemical gas sensor comprising:
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a substrate having a surface;
a counter and reference electrode being deposited on said surface;
a first sensing electrode and a second sensing electrode, being spaced apart from one another and from said counter and reference electrode, being deposited on said surface;
a first electrolytic material having a first thickness and being in contact with said first sensing electrode for carrying a flow of ions;
a second electrolytic material having a second thickness and being in contact with said second sensing electrode for carrying a flow of ions; and
said second thickness being greater than said first thickness. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. An electrochemical gas sensor comprising:
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a first cell in communication with a second cell;
each cell having;
a substrate having a surface;
a counter and reference electrode being deposited on said surface;
a first sensing electrode and a second sensing electrode, being spaced apart from one another and from said counter and reference electrode, being deposited on said surface;
a first electrolytic material in contact with said first sensing electrode for carrying a flow of ions; and
a second electrolytic material in contact with said second sensing electrode for carrying a flow of ions. - View Dependent Claims (9, 10, 11, 12)
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Specification