Micro electrical mechanical system (MEMS) tuning using focused ion beams
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Abstract
A method for tuning an electro-mechanical device such as a MEMS device is disclosed. The method comprises operating a MEMS device in a depressurized system and using FIB micromachining to remove a portion of the MEMS device. Additionally, a method for tuning a plurality of MEMS devices by depositing an active layer and then removing a portion of the active layer using FIB micromachining. Also, a method for tuning a MEMS device and vacuum packaging the MEMS device in situ are provided.
35 Citations
24 Claims
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1-14. -14. (canceled)
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15. A method for tuning electro-mechanical devices using focused ion beam (FIB) micromachining, comprising the steps of:
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providing a plurality of electro-mechanical devices each electro-mechanical device having an adjustable resonant frequency;
providing a focused ion beam;
depositing an active layer on each electro-mechanical device of the plurality of electro-mechanical devices, the active layer allowing detection of chemical and biological agents; and
tuning electro-mechanical devices of the plurality of electro-mechanical devices with the focused ion beam. - View Dependent Claims (16, 17, 18, 19, 20, 21, 22, 23)
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24-32. -32. (canceled)
Specification