Transistor
First Claim
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1. A transistor comprising:
- a cell array with at least two active transistor cells separated by a pitch;
a temperature sensor proximate to the cell array; and
an isolation structure configured to electrically isolate the temperature sensor from the cell array, and having an isolation trench arranged between the cell array and the temperature sensor;
wherein a distance between the temperature sensor and an active transistor cell that is closest to the temperature sensor corresponds approximately to the pitch between active transistor cells within the cell array.
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Abstract
A transistor has a cell array with two or more transistor cells, a temperature sensor, which is integrated in the cell array or is adjacent to the cell array, and an isolation structure. The isolation structure isolates the temperature sensor from the cell array, and has an isolation trench, which is arranged between the cell array and the temperature sensor. The distance between the temperature sensor and the active transistor cell that is closest to the temperature sensor corresponds approximately to the pitch between active transistor cells within the cell array.
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Citations
25 Claims
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1. A transistor comprising:
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a cell array with at least two active transistor cells separated by a pitch;
a temperature sensor proximate to the cell array; and
an isolation structure configured to electrically isolate the temperature sensor from the cell array, and having an isolation trench arranged between the cell array and the temperature sensor;
wherein a distance between the temperature sensor and an active transistor cell that is closest to the temperature sensor corresponds approximately to the pitch between active transistor cells within the cell array. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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15. A transistor component comprising:
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a semiconductor body in which at least two transistors that are arranged alongside one another are formed; and
isolation structures configured to electrically isolate the transistors from one another;
wherein the isolation structures each have an isolation trench. - View Dependent Claims (16, 17, 18, 19, 20, 21, 22, 23)
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24. A transistor comprising:
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a cell array having a plurality of transistor cells separated by a pitch;
a temperature sensor integrated in the cell array and separated from at least one of the plurality of transistor cells by a distance that is approximately the same as the pitch between the plurality of transistor cells; and
means for electrically isolating the temperature sensor from the cell array. - View Dependent Claims (25)
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Specification