Integral resonator gyroscope
First Claim
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1. A sensor, comprising:
- a planar mechanical resonator for sensing motion of the inertial sensor; and
a case for housing the resonator;
wherein the resonator and a wall of the case are defined through an etching process.
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Abstract
The present invention discloses an inertial sensor having an integral resonator. A typical sensor comprises a planar mechanical resonator for sensing motion of the inertial sensor and a case for housing the resonator. The resonator and a wall of the case are defined through an etching process. A typical method of producing the resonator includes etching a baseplate, bonding a wafer to the etched baseplate, through etching the wafer to form a planar mechanical resonator and the wall of the case and bonding an end cap wafer to the wall to complete the case.
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Citations
23 Claims
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1. A sensor, comprising:
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a planar mechanical resonator for sensing motion of the inertial sensor; and
a case for housing the resonator;
wherein the resonator and a wall of the case are defined through an etching process. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22)
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23. A sensor, comprising:
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a planar mechanical resonator means for sensing motion of the inertial sensor; and
a case means for housing the resonator;
wherein the resonator means and a wall of the case means are defined through an etching process.
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Specification