Wafer clean process

• US 20050274393A1
• Filed: 06/09/2004
• Published: 12/15/2005
• Est. Priority Date: 06/09/2004
• Status: Abandoned Application

• Current Assignee: Taiwan Semiconductor Manufacturing Company Limited
• Original Assignee: Taiwan Semiconductor Manufacturing Company Limited
• Inventors: Perng, Baw-Ching, Tao, Hun-Jan
• Application Number:
  US10/866,325
• Publication Number:
  US 20050274393A1
• Time in Patent Office: Days
• US Class Current: 134/2
• CPC Class Codes: B08B 3/02 Cleaning by the force of jets or sprays
• CPC Class Codes: B08B 3/04 Cleaning involving contact with liquid
• CPC Class Codes: H01L 21/02063 the processing being the formation of vias or contact holes
• CPC Class Codes: H01L 21/67051 using mainly spraying means, e.g. nozzles

Abstract

A novel process for cleaning a semiconductor wafer is disclosed. The process of the invention reduces or eliminates charge-up damage caused by friction which is generated between the wafer and rinsing water or other fluid as the wafer is rotated during the cleaning process. In one embodiment of the invention, the wafer is placed on a rotatable chuck or support inside a cleaning chamber. An ion-forming gas is introduced into the chamber as the cleaning fluid is dispensed onto the wafer. The gas increases the electrical conductivity of the cleaning fluid by forming ions in the fluid, thereby reducing or eliminating cleaning fluid charge-up and preventing breakdown of dielectric materials and/or corrosion of metal on the wafer. In another embodiment, the gas is dissolved in the cleaning fluid, which is dispensed on the rotating wafer. In still another embodiment, the cleaning fluid is heated and then dispensed onto the wafer.

Claims

1. A method for cleaning a wafer, comprising:

providing a cleaning fluid;

dissolving an ion-forming gas in said cleaning fluid;

rotating said wafer; and

dispensing said cleaning fluid onto said wafer.

2. The method of claim 1 wherein said ion-forming gas is O₂, O₃, N₂, CO₂, Ar or air.

3. The method of claim 1 wherein said cleaning fluid comprises deionized water.

4. The method of claim 2 wherein said ion-forming gas is dissolved in said cleaning fluid through electrical discharge and mixing.

5. The method of claim 2 wherein said ion-forming gas is dissolved in said cleaning fluid through bubbling and mixing.

6. The method of claim 2 wherein said dissolving an ion-forming gas in said cleaning fluid comprises providing a chamber, placing said wafer in said chamber and introducing said ion-forming gas into said chamber during said dispensing said cleaning fluid onto said wafer.

7. The method of claim 1 wherein said ion-forming gas has a gas mole fraction solubility of over about 1×

10<sup>−

6</sup> at room temperature.

8. The method of claim 1 wherein said wafer includes at least one dielectric layer having a dielectric constant of less than about 3.7.

9. The method of claim 8 wherein said at least one dielectric layer comprises carbon.

10. The method of claim 8 wherein said at least one dielectric layer comprises fluorine.

11. The method of claim 1 wherein said rotating said wafer comprises rotating said wafer at a rotational speed of less than about 700 rpm.

12. The method of claim 1 wherein said cleaning fluid has a temperature of from about 60 degrees C. to about 100 degrees C.

13. The method of claim 1 further comprising a damascene structure provided on said wafer.

14. The method of claim 13 wherein said damascene structure includes a bottom stop layer having a thickness of less than about 600 angstroms.

15. The method of claim 13 wherein said damascene structure includes a bottom stop layer comprising carbon-containing silicon oxide.

16. The method of claim 13 wherein said damascene structure includes a bottom stop layer comprising nitrogen-containing silicon oxide.

17. A method for cleaning a wafer, comprising:

applying a solvent to said wafer;

providing a cleaning fluid;

dissolving an ion-forming gas in said cleaning fluid;

rotating said wafer; and

dispensing said cleaning fluid onto said wafer.

18. The method of claim 17 wherein said solvent is a solvent selected from the group consisting of an organic solvent and an inorganic acid solvent.

19. A method for cleaning a wafer, comprising:

providing deionized water;

providing a viscosity of less than about 500 μ

Pa s to said deionized water;

rotating said wafer; and

dispensing said deionized water onto said wafer.

20. The method of claim 19 wherein said deionized water has a temperature of at least about 50 degrees C.

21. The method of claim 20 further comprising heating said wafer to said temperature.