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Ion-optical phase volume compression

  • US 20050274902A1
  • Filed: 03/24/2005
  • Published: 12/15/2005
  • Est. Priority Date: 03/25/2004
  • Status: Active Grant
First Claim
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1. Method to produce a fine monoenergetic ion beam comprising the steps:

  • (a) injecting ions into a gas-filled conditioning cell with a terminal exit diaphragm system, whereby the ions thermalize, (b) collecting the thermalized ions in a potential well in front of the exit diaphragm system, and (c) draining thermalized ions out of the conditioning cell via a point-shaped overflow potential in the exit diaphragm system, thus generating a fine beam whose ions have a high degree of energy homogeneity.

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