Curved slit valve door

• US 20050274923A1
• Filed: 06/14/2004
• Published: 12/15/2005
• Est. Priority Date: 06/14/2004
• Status: Active Grant

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Berkstresser, David E., Lewis, Gregory S., Tanase, Yoshiaki, Leung, Billy C.
• Granted Patent: US 7,575,220 B2
• Time in Patent Office: Days
• US Class Current: 251/301
• CPC Class Codes: F16K 1/2261 the sealing being arranged on the valve member
• CPC Class Codes: F16K 1/24 with valve members that, on opening of the valve, are initially lifted from the seat and next are turned around an axis parallel to the seat
• CPC Class Codes: F16K 51/02 specially adapted for high-vacuum installations

Abstract

Embodiments of an apparatus for sealing a substrate transfer passage in a chamber are provided. In on embodiment, an apparatus for sealing a substrate transfer passage in a chamber includes an elongated door member having a convex sealing face and a backside. In another embodiment, a chamber having an apparatus for sealing a substrate transfer passage is provided that includes a chamber body having an interior volume, at least one substrate access defined through the chamber body configured to allow passage of a large area substrate therethrough, and a door member having a convex sealing face moveable between a first position that covers the substrate transfer port and a second position clear of the substrate transfer port. In yet another embodiment, the chamber body may be a load lock chamber.

Claims

1. Apparatus for sealing a substrate transfer passage in a chamber, comprising:

an elongated door member having a convex sealing face and a backside.

2. The apparatus of claim 1, wherein the sealing face is convex relative to a major axis of the door member.

3. The apparatus of claim 2, wherein the sealing face further comprises:

a seal gland formed in the sealing face proximate the major and minor edges of the door member and circumscribing an inner region of the door member.

4. The apparatus of claim 3 further comprising:

a fluoropolymer seal disposed in the gland.

5. The apparatus of claim 1 further comprising:

a first mounting assembly; and

a second mounting assembly, the first and second mounting assembly coupled to opposite ends of the backside of the door member.

6. The apparatus of claim 5 further comprising:

a spring coupled to the door member proximate with at least one mounting assembly.

7. The apparatus of claim 6 further comprising:

a first shaft coupled to the first mounting assembly;

a first actuator coupled to the first shaft;

a second shaft coupled to the second mounting assembly; and

a second actuator coupled to the second shaft, wherein the first and second actuators are adapted to rotate the door member about the first and second shafts.

8. The apparatus of claim 1 further comprising:

a first means for coupling the door member to a first actuator, coupled to a first minor end of the door member; and

a second means for coupling the door member to a second actuator coupled to a second minor end of the door.

9. A chamber having an apparatus for sealing a substrate transfer passage, comprising:

a chamber body having an interior volume;

at least one substrate transfer port defined through the chamber body configured to allow passage of a large area substrate therethrough; and

a door member having a convex sealing face moveable between a first position that covers the substrate transfer port and a second position clear of the substrate transfer port.

11. The chamber of claim 10, wherein the sealing face is convex relative to a wall of the chamber body having the substrate transfer port formed therethrough.

12. The chamber of claim 10, wherein the sealing face further comprises:

a seal gland formed in the sealing face proximate a peripheral edge of the door member and circumscribing an inner region of the door member.

13. The chamber of claim 12 further comprising:

a fluoropolymer seal disposed in the gland.

14. The chamber of claim 10 further comprising:

a first shaft extending through the chamber body; and

a second shaft extending through the chamber body, the first and second shafts coupled to opposite ends of the backside of the door member.

15. The chamber of claim 14 further comprising:

a first mounting assembly coupled to a backside of the door member;

a first internal actuator arm coupled to the first shaft;

a first pin rotationally coupling the first mounting assembly to the first internal actuator arm;

a second mounting assembly coupled to the backside of the door member opposite the first mounting assembly;

a second internal actuator arm coupled the second shaft; and

a second pin rotationally coupling the second mounting assembly to the second internal actuator arm.

16. The chamber of claim 15, wherein the chamber body further comprises:

a first recess formed in a first sidewall accommodating at least a portion of the first internal actuator arm; and

a second recess formed in a second sidewall accommodating at least a portion of the second internal actuator arm.

17. The chamber of claim 4415 further comprising:

a spring coupled to the door member and adapted to urge the door member to a predefined orientation relative to the first actuator arm.

18. The chamber of claim 15 further comprising:

a first actuator coupled to the first shaft; and

a second actuator coupled to the second shaft, wherein the first and second actuators are adapted to rotate the door member about the first and second shafts.

19. The chamber of claim 10, wherein the door member is substantially rectangular and has a width of at least about 1260 millimeters.

20. The chamber of claim 10 further comprising:

a second substrate transfer port disposed through the chamber body to the internal volume.

21. The chamber of claim 20 further comprising

a second internal volume formed in the chamber body vertically stacked above the first internal volume and adapted to accommodate a large area substrate therein;

a third substrate transfer port disposed through the chamber body to the second internal volume; and

a fourth substrate transfer port disposed through the chamber body to the second internal volume.

22. A load lock chamber having an apparatus for sealing a substrate transfer passage, comprising:

a chamber body having at least one substrate transfer chamber formed therein;

a first substrate transfer port and a second substrate transfer port disposed through the chamber body to the substrate transfer chamber;

a first door member having a convex sealing face and moveable between a first position that closes the first substrate transfer port and a second position clear of the first substrate transfer port; and

a pressure control system coupled to the chamber body and adapted to control the pressure of the interior volume of the substrate transfer chamber.

23. The chamber of claim 22, wherein the sealing face Is convex relative to a wall of the chamber body having the first substrate transfer port formed therethrough.

24. The chamber of claim 23, wherein the sealing face further comprises:

a seal gland formed in the sealing face proximate a peripheral edge of the door member and circumscribing an inner region of the door member.

25. The chamber of claim 24 further comprising:

a fluoropolymer seal disposed in the gland.

26. The chamber of claim 22 further comprising:

a first shaft extending through the chamber body; and

a second shaft extending through the chamber body, the first and second shafts coupled to opposite ends of the backside of the door member.

27. The chamber of claim 26 further comprising:

a first mounting assembly coupled to a backside of the door member;

a first internal actuator arm coupled the first shaft; and

a first pin rotationally coupling the first mounting assembly to the first internal actuator arm;

a second mounting assembly coupled to the backside of the door member opposite the first mounting assembly;

a second internal actuator arm coupled the second shaft; and

a second pin rotationally coupling the second mounting assembly to the second internal actuator arm.

28. The chamber of claim 27, wherein the chamber body further comprises:

a first recess formed in a first sidewall accommodating at least a portion of the first internal actuator arm; and

a second recess formed in a second sidewall accommodating at least a portion of the second internal actuator arm.

29. The chamber of claim 22 further comprising:

a spring coupled to the door member and adapted to urge the door member to a predefined orientation relative to the chamber body when the door member is in the first position.

30. The chamber of claim 27 further comprising:

a first actuator coupled to the first shaft; and

a second actuator coupled to the second shaft, wherein the first and second actuators are adapted to rotate the door member about the first and second shafts.

31. The chamber of claim 22, wherein a width of the first substrate transfer port is at least about 1365 millimeters.

32. The chamber of claim 22 further comprising:

a second internal volume disposed in the chamber body vertically stacked above the first internal volume and adapted to accommodate a large area substrate.

33. The chamber of claim 32 further comprising:

a third substrate access port disposed through the chamber body to the second internal volume; and

a fourth substrate access port disposed through the chamber body to the second internal volume.

34. The method of claim 22 further comprising:

a first actuator disposed in the chamber body and coupled to a first end of the door member; and

a second actuator disposed in the chamber body and coupled to a second end of the door member.

35. A method for improving seal force uniformity between a wall of a chamber and an elongated door member to the chamber, comprising:

contacting a center portion of the door member to the wall of the chamber to cover a substrate access passage; and

applying closing force to the ends of the door member to flatten a sealing face of the door member.

36. The method of claim 35, wherein the step of applying the closing force to the ends of the door member further comprises:

actuating a first actuator coupled to a first end of the door member; and

actuating a second actuator coupled to a second end of the door member.

37. The method of claim 36, wherein the step of actuating the first actuator further comprises:

rotating a shaft disposed through the wall of the chamber.

38. The method of claim 37, wherein the step of actuating the first actuator further comprises:

rotating the door member at a radius to the shaft.

39. The method of claim 38, wherein the step of rotating the door member further comprises:

maintaining a pre-defined orientation of the door member relative to the chamber wall.

40. The method of claim 35, wherein the closing force applied to the ends of the door member and a spring force generated by the flattened sealing face of the door member uniformly loads a seal disposed between the door member and the wall of the chamber.