Method and structures for indexing dice
First Claim
1. A method of indexing a plurality of dice obtained from a material wafer comprising a plurality of stacked material layers, each die being obtained in a respective die position in the wafer, the method including providing a visible index on each die indicative of the respective die position, wherein providing the visible index on each die includes:
- forming in a first material layer of the die a reference structure adapted to defining a mapping of the wafer; and
forming in a second material layer of the die a marker associated with the reference structure, a position of the marker with respect to the reference structure being adapted to provide an indication of the die position in the wafer.
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Accused Products
Abstract
A method of indexing a plurality of dice obtained from a material wafer comprising a plurality of stacked material layers, each die being obtained in a respective die position in the wafer, the method including providing a visible index on each die indicative of the respective die position, wherein providing the visible index on each die includes: forming in a first material layer of the die a reference structure adapted to defining a mapping of the wafer; and forming in a second material layer of the die a marker associated with the reference structure, a position of the marker with respect to the reference structure being adapted to provide an indication of the die position in the wafer.
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Citations
27 Claims
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1. A method of indexing a plurality of dice obtained from a material wafer comprising a plurality of stacked material layers, each die being obtained in a respective die position in the wafer, the method including providing a visible index on each die indicative of the respective die position,
wherein providing the visible index on each die includes: -
forming in a first material layer of the die a reference structure adapted to defining a mapping of the wafer; and
forming in a second material layer of the die a marker associated with the reference structure, a position of the marker with respect to the reference structure being adapted to provide an indication of the die position in the wafer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A die obtained from a material wafer comprising a plurality of stacked material layers, the die being provided with a visible index indicative of a respective die position of the die in the wafer, the visible index includes
a reference structure formed in a first material layer of the die and adapted to defining a mapping of the wafer; - and
a marker formed in a second material layer of the die, associated with the reference structure, and adapted to providing an indication of the respective die position. - View Dependent Claims (12, 13)
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14. A die obtained from a wafer, the die comprising:
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first and second layers;
a first reference disposed in the first layer and defining first points that each represent a respective region of the wafer; and
a first marker disposed in the second layer and in alignment with the first point that corresponds to the region of the wafer in which the die was located. - View Dependent Claims (15, 16, 17, 18, 19, 20)
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21. A wafer, comprising:
a plurality of dies each comprising, first and second layers, a reference disposed in the first layer and defining points that each represent a respective region of the wafer, and a marker disposed in the second layer and in alignment with the point that corresponds to the region of the wafer in which the die is located.
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22. An integrated circuit, comprising:
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a package; and
a die obtained from a wafer, disposed within the package, and comprising, first and second layers, a reference disposed in the first layer and defining points that each represent a respective region of the wafer, and a marker disposed in the second layer and in alignment with the point that corresponds to the region of the wafer in which the die was located.
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23. An electronic system, comprising:
integrated circuit, comprising, a package; and
a die obtained from a wafer, disposed within the package, and comprising, first and second layers, a reference disposed in the first layer and defining points that each represent a respective region of the wafer, and a marker disposed in the second layer and in alignment with the point that corresponds to the region of the wafer in which the die was located.
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24. A method, comprising:
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aligning a first mask with a first region of a wafer having multiple regions that each include a respective die such that the first mask has a first alignment offset relative to the first region;
defining with the first mask in the die within the first region a first marker that identifies the first region;
aligning the first mask with a second region of the wafer such that the first mask has a second alignment offset relative to the second region, the second offset different from the first offset; and
defining with the first mask in the die within the second region a second marker that identifies the second region. - View Dependent Claims (25, 26)
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27. A method, comprising:
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aligning a first mask with a first region of a wafer having multiple regions that each include a respective die;
defining with the first mask in the die within the first region a first reference;
aligning a second mask with the first region such that the second mask has a first alignment offset relative to the first region;
defining with the second mask in the die within the first region a first marker having a location relative to the first reference, the location of the first marker corresponding to the first region;
aligning the first mask with a second region of the wafer;
defining with the first mask in the die within the second region the first reference;
aligning the second mask with the second region such that the second mask has a second alignment offset relative to the second region; and
defining with the second mask in the die within the second region a second marker having a location relative to the first reference, the location of the second marker corresponding to the second region.
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Specification