Light modulator
First Claim
Patent Images
1. A package comprising:
- a light modulator supported on a substrate, the light modulator including;
an optical device supported on the substrate;
a casing attached to the substrate, the casing surrounding the optical device, the casing further including sidewalls having stress relief structures therein; and
a glass lid attached to the casing, the glass lid, casing and substrate substantially sealing the optical device.
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Abstract
A method for forming a light modulator includes supporting a plurality of optical devices on a substrate, and attaching a sheet of glass over the optical devices. The method also includes slicing the sheet of glass into a plurality of pieces of glass.
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Citations
32 Claims
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1. A package comprising:
a light modulator supported on a substrate, the light modulator including;
an optical device supported on the substrate;
a casing attached to the substrate, the casing surrounding the optical device, the casing further including sidewalls having stress relief structures therein; and
a glass lid attached to the casing, the glass lid, casing and substrate substantially sealing the optical device. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A substrate comprising:
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a first major surface;
a second major surface;
a plurality of optical devices supported on the first major surface;
a metal sheet including a plurality of connected casings, each casing including an aperture, the casing further including sidewalls surrounding the apertures, the metal sheet supported on the first major surface so that the sidewalls of at least two of said plurality of casings surround at least two of the optical devices attached to the first major surface. - View Dependent Claims (13, 14, 15, 16, 17, 18, 19, 20)
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21. A method for forming a plurality of light modulators comprising:
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supporting a plurality of optical devices on a substrate; and
placing a sheet of glass over the optical devices;
slicing the sheet of glass into a plurality of pieces of glass, wherein at least two of the pieces of glass are associated with at least two of the plurality of optical devices supported on the substrate. - View Dependent Claims (22, 23, 24, 25, 26, 27, 28, 29, 30)
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31. A light modulator comprising:
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a substrate;
an optical device supported on the substrate; and
means for supporting and tilting glass positioned proximate the optical device. - View Dependent Claims (32)
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Specification