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Probe card and a method for detecting defects using a probe card and an additional inspection

  • US 20050278134A1
  • Filed: 02/15/2005
  • Published: 12/15/2005
  • Est. Priority Date: 02/17/2004
  • Status: Active Grant
First Claim
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1. A method for defect localization comprising:

  • (a) supplying, by a probe card, at least one electrical signal to a first set of test structure pads and viewing a first set of test structures that are coupled to the first set of test structure pads;

    (b) supplying, by the probe card, at least one electrical signal to a second set of test structure pads and viewing a second set of test structures that are coupled to the second set of test structure pads.

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