SUBSTRATE CONTACT ANALYSIS
First Claim
1. A system for analyzing substrate yield, the system comprising:
- means for selecting a substrate yield map, means for selecting a substrate contact map, and means for overlaying the substrate yield map and the substrate contact map and producing a composite map.
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Abstract
A method of analyzing substrate yield, where a substrate yield map and a substrate contact map are selected and overlaid to produce a composite map. First elements of the substrate yield map are compared to second elements of the substrate contact map to determine a degree of correlation between the first elements and the second elements. Additional substrate contact maps are repeatedly selected and the first elements of the substrate yield map are compared to the second elements of the additional substrate contact maps, and a degree of correlation between the first elements and each of the second elements for the additional substrate contact maps is determined and reported. The composite map having a highest degree of correlation between the first elements and the second elements is presented, and all composite maps that have at least a desired degree of correlation between the first elements and the second elements are presented.
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Citations
20 Claims
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1. A system for analyzing substrate yield, the system comprising:
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means for selecting a substrate yield map, means for selecting a substrate contact map, and means for overlaying the substrate yield map and the substrate contact map and producing a composite map. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A system for analyzing substrate yield, the system comprising:
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means for selecting a substrate yield map having first elements in first positions according to a coordinate position system, means for selecting a substrate contact map having second elements in second positions according to the coordinate position system, means for overlaying the substrate yield map and the substrate contact map and producing a composite map including both the first elements and the second elements according to the coordinate position system, means for comparing the first positions of the first elements to the second positions of the second elements and determining a degree of correlation between the first elements and the second elements, means for repeatedly selecting additional substrate contact maps, and comparing the first positions of the first elements of the substrate yield map to the second positions of the second elements of the additional substrate contact maps, and determining a degree of correlation between the first elements and each of the second elements for the additional substrate contact maps, and reporting the degrees of correlation between the first elements and sets of the second elements, and means for presenting all composite maps that have at least a desired degree of correlation between the first elements and the second elements. - View Dependent Claims (11)
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12. A method of analyzing substrate yield, the method comprising the steps of:
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selecting a substrate yield map, selecting a substrate contact map, and overlaying the substrate yield map and the substrate contact map and producing a composite map. - View Dependent Claims (13, 14, 15, 16, 17, 18, 19, 20)
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Specification