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Methods of scanning an object that includes multiple regions of interest using an array of scanning beams

  • US 20050279936A1
  • Filed: 03/09/2005
  • Published: 12/22/2005
  • Est. Priority Date: 06/21/2004
  • Status: Active Grant
First Claim
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1. A method for inspecting an object that comprises multiple regions of interest, the method comprising:

  • determining a first spatial relationship between at least two regions of interest positioned along a region of interest axis; and

    positioning, at least in response to the first spatial relationship, the object under multiple beams of an beam array, such that at least two beams of the beam array that are positioned along a beam array axis scan substantially simultaneously the at least two regions of interest, wherein the first axis is oriented in relation to the beam array axis.

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